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Cited by
All
Since 2019
Citations
16
16
h-index
2
2
i10-index
1
1
0
8
4
2020
2021
2022
2023
1
4
4
7
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Thanh Tung Le
Thin Films Process Development Engineer, Micron
Verified email at utexas.edu
Thin films deposition
thin films characterization
semiconductor materials
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Year
Epitaxial growth of high-k BaxSr1− xTiO3 thin films on SrTiO3 (001) substrates by atomic layer deposition
TT Le, JG Ekerdt
Journal of Vacuum Science & Technology A 38 (3)
, 2020
11
2020
Epitaxial growth by atomic layer deposition and properties of high-k barium strontium titanate on Zintl-templated Ge (001) substrates
TT Le, CH Lam, AB Posadas, AA Demkov, JG Ekerdt
Journal of Vacuum Science & Technology A 40 (1)
, 2022
4
2022
The atomic layer deposition of ultrahigh-k oxides
TT Le
1
2022
Manipulating the Dielectric Properties of Crystalline Perovskite Films through Isovalent A-site Cation Substitution
TT Le, JG Ekerdt
Electrochemical Society Meeting Abstracts 240, 859-859
, 2021
2021
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