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Thanh Tung Le
Thanh Tung Le
Thin Films Process Development Engineer, Micron
Verified email at utexas.edu
Title
Cited by
Cited by
Year
Epitaxial growth of high-k BaxSr1− xTiO3 thin films on SrTiO3 (001) substrates by atomic layer deposition
TT Le, JG Ekerdt
Journal of Vacuum Science & Technology A 38 (3), 2020
112020
Epitaxial growth by atomic layer deposition and properties of high-k barium strontium titanate on Zintl-templated Ge (001) substrates
TT Le, CH Lam, AB Posadas, AA Demkov, JG Ekerdt
Journal of Vacuum Science & Technology A 40 (1), 2022
42022
The atomic layer deposition of ultrahigh-k oxides
TT Le
12022
Manipulating the Dielectric Properties of Crystalline Perovskite Films through Isovalent A-site Cation Substitution
TT Le, JG Ekerdt
Electrochemical Society Meeting Abstracts 240, 859-859, 2021
2021
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Articles 1–4