Follow
Olli E. Setälä
Olli E. Setälä
Department of Electronics and Nanoengineering, Aalto University
Verified email at phnet.fi
Title
Cited by
Cited by
Year
Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching
X Liu, B Radfar, K Chen, OE Setälä, TP Pasanen, M Yli-Koski, H Savin, ...
IEEE Transactions on Semiconductor Manufacturing 35 (3), 504-510, 2022
162022
Harnessing carrier multiplication in silicon solar cells using UV photons
K Chen, OE Setälä, B Radfar, U Kroth, V Vähänissi, H Savin
IEEE Photonics Technology Letters 33 (24), 1415-1418, 2021
82021
Boron-implanted black silicon photodiode with close-to-ideal responsivity from 200 to 1000 nm
OE Setälä, K Chen, TP Pasanen, X Liu, B Radfar, V Vähänissi, ...
ACS photonics 10 (6), 1735-1741, 2023
42023
Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space
B Radfar, K Chen, OE Setälä, V Vähänissi, H Savin, X Liu
Optics Letters 48 (5), 1224-1227, 2023
32023
Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode
K Chen, OE Setälä, X Liu, B Radfar, TP Pasanen, MD Serué, J Heinonen, ...
IEEE Sensors Journal 23 (7), 6750-6756, 2023
22023
Al‐neal Degrades Al2O3 Passivation of Silicon Surface
OE Setälä, TP Pasanen, J Ott, V Vähänissi, H Savin
physica status solidi (a) 218 (23), 2100214, 2021
12021
Alpha particle silicon detectors based on induced junction
O Setälä
12021
CMOS Image Sensor for Broad Spectral Range with> 90% Quantum Efficiency
OE Setälä, MJ Prest, KD Stefanov, D Jordan, MR Soman, V Vähänissi, ...
Small 19 (47), 2304001, 2023
2023
(invited talk) Excellent Responsivity and Low Dark Current Obtained with Black Si Photodiode
H Savin, K Chen, O Setälä, X Liu, B Radfar, V Vähänissi
IEEE SENSORS, 2023
2023
Improved QE in CMOS image sensors with nano-black antireflection layer
MJ Prest, O Setälä, KD Stefanov, V Vähänissi, H Savin, D Jordan
2023
(oral talk) Compatibility of Al-neal in processing of Si devices with Al2O3 layer
O Setälä, T Pasanen, J Ott, V Vähänissi, H Savin
Conference on Gettering and Defect Engineering in Semiconductor Technology, 2022
2022
(oral talk) Improved QE in CMOS image sensors with nano-black antireflection layer
MJ Prest, O Setälä, KD Stefanov, V Vähänissi, H Savin, D Jordan
International Image Sensor Workshop, 2022
2022
(oral talk) Record-high UV response in implanted junctions through passivation of surface defects and minimisation of boron implantation damage
K Chen, O Setälä, B Radfar, U Kroth, V Vähänissi, H Savin
Record-high UV response in implanted junctions through passivation of …, 2022
2022
(invited talk) Black silicon for PV—Which fabrication technology to choose?
X Liu, B Radfar, K Chen, O Setälä, T Pasanen, V Vähänissi, H Savin
Material Research Society Fall Meeting, 2021
2021
Sääolosuhteiden vaikutukset radioastronomisiin havaintoihin
O Setälä
2018
The system can't perform the operation now. Try again later.
Articles 1–15