Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching X Liu, B Radfar, K Chen, OE Setälä, TP Pasanen, M Yli-Koski, H Savin, ... IEEE Transactions on Semiconductor Manufacturing 35 (3), 504-510, 2022 | 16 | 2022 |
Harnessing carrier multiplication in silicon solar cells using UV photons K Chen, OE Setälä, B Radfar, U Kroth, V Vähänissi, H Savin IEEE Photonics Technology Letters 33 (24), 1415-1418, 2021 | 8 | 2021 |
Boron-implanted black silicon photodiode with close-to-ideal responsivity from 200 to 1000 nm OE Setälä, K Chen, TP Pasanen, X Liu, B Radfar, V Vähänissi, ... ACS photonics 10 (6), 1735-1741, 2023 | 4 | 2023 |
Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space B Radfar, K Chen, OE Setälä, V Vähänissi, H Savin, X Liu Optics Letters 48 (5), 1224-1227, 2023 | 3 | 2023 |
Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode K Chen, OE Setälä, X Liu, B Radfar, TP Pasanen, MD Serué, J Heinonen, ... IEEE Sensors Journal 23 (7), 6750-6756, 2023 | 2 | 2023 |
Al‐neal Degrades Al2O3 Passivation of Silicon Surface OE Setälä, TP Pasanen, J Ott, V Vähänissi, H Savin physica status solidi (a) 218 (23), 2100214, 2021 | 1 | 2021 |
Alpha particle silicon detectors based on induced junction O Setälä | 1 | 2021 |
CMOS Image Sensor for Broad Spectral Range with> 90% Quantum Efficiency OE Setälä, MJ Prest, KD Stefanov, D Jordan, MR Soman, V Vähänissi, ... Small 19 (47), 2304001, 2023 | | 2023 |
(invited talk) Excellent Responsivity and Low Dark Current Obtained with Black Si Photodiode H Savin, K Chen, O Setälä, X Liu, B Radfar, V Vähänissi IEEE SENSORS, 2023 | | 2023 |
Improved QE in CMOS image sensors with nano-black antireflection layer MJ Prest, O Setälä, KD Stefanov, V Vähänissi, H Savin, D Jordan | | 2023 |
(oral talk) Compatibility of Al-neal in processing of Si devices with Al2O3 layer O Setälä, T Pasanen, J Ott, V Vähänissi, H Savin Conference on Gettering and Defect Engineering in Semiconductor Technology, 2022 | | 2022 |
(oral talk) Improved QE in CMOS image sensors with nano-black antireflection layer MJ Prest, O Setälä, KD Stefanov, V Vähänissi, H Savin, D Jordan International Image Sensor Workshop, 2022 | | 2022 |
(oral talk) Record-high UV response in implanted junctions through passivation of surface defects and minimisation of boron implantation damage K Chen, O Setälä, B Radfar, U Kroth, V Vähänissi, H Savin Record-high UV response in implanted junctions through passivation of …, 2022 | | 2022 |
(invited talk) Black silicon for PV—Which fabrication technology to choose? X Liu, B Radfar, K Chen, O Setälä, T Pasanen, V Vähänissi, H Savin Material Research Society Fall Meeting, 2021 | | 2021 |
Sääolosuhteiden vaikutukset radioastronomisiin havaintoihin O Setälä | | 2018 |