ZnO Schottky ultraviolet photodetectors S Liang, H Sheng, Y Liu, Z Huo, Y Lu, H Shen Journal of crystal Growth 225 (2-4), 110-113, 2001 | 1191 | 2001 |
Schottky diode with Ag on epitaxial ZnO film H Sheng, S Muthukumar, NW Emanetoglu, Y Lu Applied physics letters 80 (12), 2132-2134, 2002 | 244 | 2002 |
Selective MOCVD growth of ZnO nanotips S Muthukumar, H Sheng, J Zhong, Z Zhang, NW Emanetoglu, Y Lu IEEE Transactions on Nanotechnology 2 (1), 50-54, 2003 | 142 | 2003 |
Nonalloyed Al ohmic contacts to MgxZn1−xO H Sheng, NW Emanetoglu, S Muthukumar, S Feng, Y Lu Journal of Electronic Materials 31, 811-814, 2002 | 82 | 2002 |
Ta/Au ohmic contacts to n-type ZnO H Sheng, NW Emanetoglu, S Muthukumar, BV Yakshinskiy, S Feng, Y Lu Journal of Electronic Materials 32, 935-938, 2003 | 80 | 2003 |
A 7nm CMOS technology platform for mobile and high performance compute application S Narasimha, B Jagannathan, A Ogino, D Jaeger, B Greene, C Sheraw, ... 2017 IEEE International Electron Devices Meeting (IEDM), 29.5. 1-29.5. 4, 2017 | 64 | 2017 |
Schottky diode with silver layer contacting the ZnO and MgxZn1-xO films Y Lu, H Sheng, S Muthukumar, NW Emanetoglu, J Zhong US Patent 6,846,731, 2005 | 20 | 2005 |
Schottky diode with silver layer contacting the ZnO and MgxZn1− xO films Y Lu, H Sheng, S Muthukumar, NW Emanetoglu, J Zhong, S Liang US Patent 7,400,030, 2008 | 11 | 2008 |
Self-aligned lithographic patterning with variable spacings SHU Jiehui, Q Fang, DW Fisher, H Huang, J Liu, H Sheng, Z Sun US Patent 9,711,447, 2017 | 9 | 2017 |
SiCl4-based reactive ion etching of ZnO and MgxZn1−xO films on r-sapphire substrates J Zhu, G Saraf, J Zhong, HF Sheng, BV Yakshinskiy, Y Lu Journal of electronic materials 35, 1311-1315, 2006 | 8 | 2006 |
Devices and methods of forming SADP on SRAM and SAQP on logic SHU Jiehui, D Jaeger, GJ Derderian, H Sheng, J Liu US Patent 9,761,452, 2017 | 7 | 2017 |
Poly profile engineering to modulate spacer induced stress for device enhancement V Ho, W Lin, YW Teh, YK Siew, BC Zhang, F Zhang, H Sheng, JB Tan US Patent 7,993,997, 2011 | 7 | 2011 |
Zhong. J; Zhang, Z.; Ematetoglu, NW; Yicheng, L S Muthukumar, H Sheng Nanotechnology, IEEE 2, 50-54, 2003 | 7 | 2003 |
Implantation for shallow trench isolation (STI) formation and for stress for transistor performance enhancement B Zhang, J Widodo, JB Tan, YK Siew, F Zhang, H Sheng, W Lin, YW Teh, ... US Patent App. 12/214,854, 2009 | 6 | 2009 |
Local-Topography-Induced Defects during Tungsten Chemical Mechanical Polishing and Their Impact on Back End of Line H Yu, XB Wang, HF Sheng, W Lu, MS Zhou Journal of the Electrochemical Society 156 (1), H64, 2008 | 6 | 2008 |
Notched fin structures and methods of manufacture SHU Jiehui, ZHU Baofu, H Sheng, J Liu, SM Pandey, J Singh US Patent App. 15/292,808, 2018 | 5 | 2018 |
Competitive and cost effective copper/low-k interconnect (BEOL) for 28 nm CMOS technologies R Augur, C Child, JH Ahn, TJ Tang, L Clevenger, D Kioussis, H Masuda, ... Microelectronic engineering 92, 42-44, 2012 | 5 | 2012 |
Integrated circuits including a dummy metal feature and methods of forming the same H Sheng, S Zhao, JB Tan, SY Siah US Patent 10,062,641, 2018 | 2 | 2018 |
UV assisted densification of perhydropolysilazane (PHPS) based spin-on glass in high aspect ratio gap fill structure S Mehta, H Sheng, R Krishnan, B Haran, T Han, Z Bayindir, M Berardi, ... ECS Transactions 85 (13), 717, 2018 | 2 | 2018 |
Integrated circuit system employing alternating conductive layers H Sheng, F Zhang, JB Tan, BC Zhang, DK Sohn US Patent 9,147,654, 2015 | 2 | 2015 |