| Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser L Behnke, R Schupp, Z Bouza, M Bayraktar, Z Mazzotta, R Meijer, J Sheil, ... Optics express 29 (3), 4475-4487, 2021 | 42 | 2021 |
| Characterization of 1- and -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light R Schupp, L Behnke, J Sheil, Z Bouza, M Bayraktar, W Ubachs, ... Physical Review Research 3 (1), 013294, 2021 | 23 | 2021 |
| Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, ... Journal of Physics D: Applied Physics 54 (36), 365103, 2021 | 22 | 2021 |
| EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, ... Journal of physics B: atomic, molecular and optical physics 53 (19), 195001, 2020 | 12 | 2020 |
| Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy-and charge-state-resolved spectrometry of tin laser-produced plasma L Poirier, A Bayerle, A Lassise, F Torretti, R Schupp, L Behnke, Y Mostafa, ... Applied Physics B 128 (3), 39, 2022 | 9 | 2022 |
| The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range Z Bouza, J Byers, J Scheers, R Schupp, Y Mostafa, L Behnke, Z Mazzotta, ... AIP advances 11 (12), 2021 | 9 | 2021 |
| Energy-and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer L Poirier, A Lassise, Y Mostafa, L Behnke, N Braaksma, L Assink, ... Applied Physics B 128 (7), 135, 2022 | 7 | 2022 |
| Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma Y Mostafa, L Behnke, DJ Engels, Z Bouza, J Sheil, W Ubachs, ... Applied Physics Letters 123 (23), 2023 | 2 | 2023 |
| High-energy parametric oscillator and amplifier pulsed light source at 2-µm L Behnke, EJ Salumbides, G Göritz, Y Mostafa, D Engels, W Ubachs, ... Optics Express 31 (15), 24142-24156, 2023 | 2 | 2023 |
| Two-micrometer-wavelength laser-produced tin plasma EUV sources L Behnke, Y Mostafa, Z Bouza, A Lassise, L Poirier, J Sheil, W Ubachs, ... International Conference on Extreme Ultraviolet Lithography 2022, PC122920D, 2022 | 1 | 2022 |
| Theoretical and experimental analysis of scan angle-depending pulse front tilt in optical systems for laser scanners L Büsing, T Bonhoff, L Behnke, J Stollenwerk, P Loosen Advanced Optical Technologies 5 (1), 55-60, 2016 | 1 | 2016 |
| Highly Efficient 13.5 nm Light Generation Using 2 μm Laser Driven Tin Plasma Y Mostafa, L Behnke, DJ Engels, Z Bouza, J Sheil, W Ubachs, ... Compact EUV & X-ray Light Sources, ETu5A. 3, 2024 | | 2024 |
| Efficient EUV Light Plasma Sources Driven by a 2-μm-Wavelength Laser LP Behnke | | 2023 |
| Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV OO Versolato, R Schupp, L Behnke, YY Mostafa, Z Bouza, A Lassise, ... Compact EUV & X-ray Light Sources, ETh5A. 7, 2022 | | 2022 |
| Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas L Behnke, YY Mostafa, R Schupp, Z Bouza, A Lassise, M Bayraktar, ... Mid-Infrared Coherent Sources, JW5A. 8, 2022 | | 2022 |
| Investigation of tin plasma driven by high-energy 2-µm-wavelength light L Behnke, Y Mostafa, Z Bouza, L Poirier, A Lassise, R Schupp, ... 48th European Physical Society Conference on Plasma Physics, EPS 2022, 2022 | | 2022 |
| EUV RADIATION SOURCE L Behnke WO Patent WO2021228517A1, 2021 | | 2021 |
| Characterization of tin plasma driven by high-energy, 2-μm-wavelength light L Behnke, R Schupp, Z Bouza, Y Mostafa, A Lassise, L Poirier, J Sheil, ... EGAS 52, 2021 | | 2021 |
| Spectral investigation of tin ions in an electron beam ion trap and laser-produced plasmas in the EUV region J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, ... EGAS 52, 2021 | | 2021 |
| EUV spectroscopy of Sn ions in an electron beam ion trap and laser-produced plasmas Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, ... Physics@ Veldhoven 2021: The Magic of Physics, 2021 | | 2021 |
