Follow
Dehua Li
Dehua Li
Auburn University
Verified email at auburn.edu
Title
Cited by
Cited by
Year
Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images
D Li, R Guo, SY Lee, J Choi, SB Kim, SH Park, IK Shin, CU Jeon
Journal of Vacuum Science & Technology B 34 (6), 2016
52016
Transverse vibration analysis of concentrated mass-loaded thin circular plate based on strcutural circumferential periodicity
D Li, J Zhang, D Li, F Bi
Transactions of Tianjin University 21 (2), 147-152, 2015
32015
Estimation of critical dimension and line edge roughness using a neural network
D Li, SY Lee, J Choi, SB Kim, CU Jeon
Journal of Vacuum Science & Technology B 39 (3), 2021
22021
3D modeling of electron-beam lithographic process from scanning electron microscope images
D Li, SY Lee, J Choi, SB Kim, CU Jeon
Journal of Vacuum Science & Technology B 39 (1), 2021
2021
The system can't perform the operation now. Try again later.
Articles 1–4