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S.V. Babu
S.V. Babu
Verified email at clarkson.edu
Title
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Cited by
Year
Mapping the world’s free-flowing rivers
G Grill, B Lehner, M Thieme, B Geenen, D Tickner, F Antonelli, S Babu, ...
Nature 569 (7755), 215-221, 2019
17522019
Solid State Sci
J Ecs
Technol 2, P311, 2013
3622013
Quasiparticle interaction in liquid 3He
S Babu, GE Brown
Annals of Physics 78 (1), 1-38, 1973
3111973
Excimer laser etching of polymers
V Srinivasan, MA Smrtic, SV Babu
Journal of applied physics 59 (11), 3861-3867, 1986
3021986
Modification of the Preston equation for the chemical–mechanical polishing of copper
Q Luo, S Ramarajan, SV Babu
Thin solid films 335 (1-2), 160-167, 1998
2451998
Metallized Plastics
KL Mittal, JR Susko
Electrochemical Society Symposium on Metallized Plastics, 2001
2342001
Advances in chemical mechanical planarization (CMP)
B Suryadevara
Woodhead Publishing, 2016
2052016
Hydroxyl Radical Formation in H 2 O 2‐Amino Acid Mixtures and Chemical Mechanical Polishing of Copper
M Hariharaputhiran, J Zhang, S Ramarajan, JJ Keleher, Y Li, SV Babu
Journal of the Electrochemical Society 147 (10), 3820, 2000
1772000
Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria
SH Lee, Z Lu, SV Babu, E Matijević
Journal of materials Research 17 (10), 2744-2749, 2002
1602002
Chemical–mechanical polishing of copper in alkaline media
Q Luo, DR Campbell, SV Babu
Thin Solid Films 311 (1-2), 177-182, 1997
1541997
Colloid aspects of chemical–mechanical planarization
E Matijević, SV Babu
Journal of colloid and interface science 320 (1), 219-237, 2008
1232008
Effect of pH on CMP of copper and tantalum
A Jindal, SV Babu
Journal of the Electrochemical Society 151 (10), G709, 2004
1202004
Copper dissolution in aqueous ammonia-containing media during chemical mechanical polishing
Q Luo, RA Mackay, SV Babu
Chemistry of materials 9 (10), 2101-2106, 1997
1201997
Shallow trench isolation chemical mechanical planarization: a review
R Srinivasan, PVR Dandu, SV Babu
ECS Journal of Solid State Science and Technology 4 (11), P5029, 2015
1162015
Achievement of high planarization efficiency in CMP of copper at a reduced down pressure
S Pandija, D Roy, SV Babu
Microelectronic Engineering 86 (3), 367-373, 2009
1042009
Cobalt polishing with reduced galvanic corrosion at copper/cobalt interface using hydrogen peroxide as an oxidizer in colloidal silica-based slurries
BC Peethala, HP Amanapu, URK Lagudu, SV Babu
Journal of The Electrochemical Society 159 (6), H582, 2012
1012012
Synergistic roles of dodecyl sulfate and benzotriazole in enhancing the efficiency of CMP of copper
Y Hong, VK Devarapalli, D Roy, SV Babu
Journal of the Electrochemical Society 154 (6), H444, 2007
1002007
Relative roles of H 2 O 2 and glycine in CMP of copper studied with impedance spectroscopy
J Lu, JE Garland, CM Pettit, SV Babu, D Roy
Journal of the Electrochemical Society 151 (10), G717, 2004
1002004
Chemical mechanical polishing using mixed abrasive slurries
A Jindal, S Hegde, SV Babu
Electrochemical and Solid-State Letters 5 (7), G48, 2002
1002002
Citric acid as a complexing agent in CMP of copper: Investigation of surface reactions using impedance spectroscopy
VRK Gorantla, KA Assiongbon, SV Babu, D Roy
Journal of the Electrochemical Society 152 (5), G404, 2005
972005
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