| CMOS-compatible contacts to n-InP E Ghegin, P Rodriguez, M Pasquali, I Sagnes, JL Lábár, V Delaye, T Card, ... IEEE Transactions on Electron Devices 64 (11), 4408-4414, 2017 | 15 | 2017 |
| Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective deposition M Pasquali, S De Gendt, S Armini Applied Surface Science 540, 148307, 2021 | 14 | 2021 |
| Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns M Pasquali, P Carolan, S Sergeant, J Meersschaut, V Spampinato, ... ACS Applied Electronic Materials 4 (4), 1703-1714, 2022 | 13 | 2022 |
| The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition A Brady-Boyd, R O'Connor, S Armini, V Selvaraju, M Pasquali, G Hughes, ... Applied Surface Science 586, 152679, 2022 | 9 | 2022 |
| Nanomechanical characterization of organic surface passivation films on 50 nm patterns during area-selective deposition M Pasquali, S Sergeant, T Conard, V Spampinato, A Viva, S De Gendt, ... ACS Applied Electronic Materials 3 (6), 2622-2630, 2021 | 9 | 2021 |
| Area-selective deposition by a combination of organic film passivation and atomic layer deposition M Pasquali, S De Gendt, S Armini ECS Transactions 92 (3), 25, 2019 | 7 | 2019 |
| Area-Selective Deposition of AlOx and Al-Silicate for Fully Self-Aligned Via Integration M Pasquali, A Brady-Boyd, A Lesniewska, P Carolan, T Conard, ... ACS Applied Materials & Interfaces 15 (4), 6079-6091, 2023 | 2 | 2023 |
| CMOS-compatible contacts for Si photonics from solid-state reaction to laser integration E Ghegin, S Zhiou, S Bensalem, L Toselli, M Pasquali, S Favier, C Jany, ... 2018 IEEE International Interconnect Technology Conference (IITC), 19-21, 2018 | 1 | 2018 |
| Area-selective deposition and bottom-up approaches: an overview of applications in IC manufacturing S Armini, M Krishtab, M Pasquali, JK Lodha, A Delabie, M van der Veen, ... Advanced Etch Technology and Process Integration for Nanopatterning XIII, 2024 | | 2024 |
| Study of surface mechanisms in organic film mediated area selective atomic layer deposition M Pasquali | | 2024 |
| Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns A Viva, M Pasquali, P Carolan, S Sergeant, J Meersschaut, T Conard, ... | | 2022 |
| (Invited) Area-Selective Atomic Layer Deposition for Interconnect Applications M Pasquali, S De Gendt, S Armini Electrochemical Society Meeting Abstracts 240, 867-867, 2021 | | 2021 |
| Vapor phase thiol self-assembled monolayers enabling area-selective deposition S Herregods, T Delande, M Pasquali, Z Tokei, H Struyf, S Armini | | 2019 |
| Vapor phase thiol self-assembled monolayers for DoD ASD S Herregods, T Delande, M Pasquali, Z Tokei, H Struyf, S Armini | | 2019 |
| Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition … S Armini, M Pasquali | | 2019 |
| Downscaling area-selective deposition to sub-30 nm half-pitch lines M Pasquali, G Murdoch, Z Tokei, S De Gendt, S Armini | | 2019 |
| Area-selective deposition of low-k materials by means of the sol-gel method M Redzheb, M Pasquali, S Armini | | 2018 |
| Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning M Pasquali, S De Gendt, S Armini, A Illiberi, G Verni, S Deng, M Givens | | 2018 |
