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Thomas Schiml
Thomas Schiml
Verified email at intel.com
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High performance and low power transistors integrated in 65nm bulk CMOS technology
Z Luo, A Steegen, M Eller, R Mann, C Baiocco, P Nguyen, L Kim, ...
IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 …, 2004
1052004
A 0.13/spl mu/m CMOS platform with Cu/low-k interconnects for system on chip applications
T Schiml, S Biesemans, G Brase, L Burrell, A Cowley, KC Chen, ...
2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001
842001
65nm CMOS technology for low power applications
A Steegen, R Mo, R Mann, MC Sun, M Eller, G Leake, D Vietzke, A Tilke, ...
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., 64-67, 2005
612005
High performance 50 nm CMOS devices for microprocessor and embedded processor core applications
SF Huang, CY Lin, YS Huang, T Schafbauer, M Eller, YC Cheng, ...
International Electron Devices Meeting. Technical Digest (Cat. No. 01CH37224 …, 2001
542001
Stress proximity technique for performance improvement with dual stress liner at 45nm technology and beyond
C Davis, JH Ku, T Schiml, J Sudijono, I Yang, A Steegen, D Coolbough, ...
2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers., 60-61, 2006
422006
A modular 0.13/spl mu/m bulk CMOS technology for high performance and low power applications
LK Han, S Biesemans, J Heidenreich, K Houlihan, C Lin, V McGahay, ...
2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No …, 2000
372000
'System on a chip'technology platform for 0.18/spl mu/m digital, mixed signal and eDRAM applications
R Mahnkopf, KH Allers, M Armacost, A Augustin, J Barth, G Brase, ...
International Electron Devices Meeting 1999. Technical Digest (Cat. No …, 1999
321999
Integration of high-performance, low-leakage and mixed signal features into a 100 nm CMOS technology
T Schafbauer, J Brighten, YC Chen, L Clevenger, M Commons, A Cowley, ...
2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No …, 2002
262002
Hot carrier reliability for 0.13/spl mu/m CMOS technology with dual gate oxide thickness
C Lin, S Biesemans, LK Han, K Houlihan, T Schiml, K Schruefer, C Wann, ...
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
252000
IEDM Tech. Dig.
A Steegen, M Stucchi, A Lauwers, K Maex
IEDM Tech. Dig 497, 1999
121999
A 45nm low cost low power platform by using integrated dual-stress-liner technology
J Yuan, S Tan, Y Lee, J Kim, R Lindsay, V Sardesai, T Hook, R Amos, ...
2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers., 100-101, 2006
112006
A 0.18 um Dual Gate (3.5 nm/6.8 nm) CMOS Technology with Copper Metallurgy for Logic, SRAM, and Analog Applications
B Agarwala, M Armacost, S Biesemans, L Burrell, B Chen, K Han, ...
29th European Solid-State Device Research Conference, 1999
61999
Semiconductor devices
T Schiml, M Eller
US Patent 8,242,550, 2012
52012
W-polycide dual-gate structure for sub-1/4 micron low-voltage CMOS technology
J Bevk, GE Georgiou, M Frei, PJ Silverman, EJ Lloyd, Y Kim, H Luftman, ...
Proceedings of International Electron Devices Meeting, 893-896, 1995
41995
RTA processing of W-polycide dual-gate sub-micron structures for low-voltage CMOS technology
J Bevk, M Furtsch, GE Georgiou, SJ Hillenius, D Schielein, T Schiml, ...
MRS Online Proceedings Library (OPL) 429, 115, 1996
11996
Semiconductor devices and methods of manufacture thereof
T Schiml, M Eller
US Patent 7,776,726, 2010
2010
Mechanism of Threshold Voltage Shift (ΔV_< th>) Caused by Negative Bias Temperature Instability (NBTI) in Deep Sub-Micron pMOSFETs
LIN Chih-Yung, J CHEN, K SCHRUEFER, T SCHIML, Z YANG, ...
Extended abstracts of the... Conference on Solid State Devices and Materials …, 2001
2001
Measurement of Dopant Lateral Diffusion in Layered Thin Films
J Bevk, M Furtsch, T Schiml, GE Georgiou, HS Luftman
APS March Meeting Abstracts, F20. 11, 1997
1997
Measurement of lateral dopant diffusion in rapid thermal annealed W-polycide gate structures
T Schiml, J Bevk, M Furtsch, GE Georgiou, R Cirelli, WM Mansfield, ...
MRS Online Proceedings Library (OPL) 429, 121, 1996
1996
High Performance and Low Power Transistors Integrated in 65nm Bulk CMOS Technology
T Schiml, J Sudijono, I Yang, C Wann
dimension 3, 61, 0
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