| Flexible Control of Block Copolymer Directed Self‐Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning H Yi, XY Bao, J Zhang, C Bencher, LW Chang, X Chen, R Tiberio, ... Advanced Materials 24 (23), 3107-3114, 2012 | 143 | 2012 |
| Directed self-assembly defectivity assessment. Part II C Bencher, H Yi, J Zhou, M Cai, J Smith, L Miao, O Montal, S Blitshtein, ... Alternative Lithographic Technologies IV 8323, 125-134, 2012 | 80 | 2012 |
| Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library Y Du, D Guo, MDF Wong, H Yi, HSP Wong, H Zhang, Q Ma 2013 IEEE/ACM International Conference on Computer-Aided Design (ICCAD), 186-193, 2013 | 64 | 2013 |
| SRAM, NAND, DRAM contact hole patterning using block copolymer directed self-assembly guided by small topographical templates XY Bao, H Yi, C Bencher, LW Chang, H Dai, Y Chen, PTJ Chen, ... 2011 International Electron Devices Meeting, 7.7. 1-7.7. 4, 2011 | 56 | 2011 |
| A general design strategy for block copolymer directed self-assembly patterning of integrated circuits contact holes using an alphabet approach H Yi, XY Bao, R Tiberio, HSP Wong Nano letters 15 (2), 805-812, 2015 | 53 | 2015 |
| Contact-hole patterning for random logic circuits using block copolymer directed self-assembly H Yi, XY Bao, J Zhang, R Tiberio, J Conway, LW Chang, S Mitra, ... Alternative Lithographic Technologies IV 8323, 172-177, 2012 | 52 | 2012 |
| Block copolymer directed self-assembly enables sublithographic patterning for device fabrication HSP Wong, C Bencher, H Yi, XY Bao, LW Chang Alternative Lithographic Technologies IV 8323, 26-32, 2012 | 51 | 2012 |
| Design strategy of small topographical guiding templates for sub-15nm integrated circuits contact hole patterns using block copolymer directed self assembly H Yi, XY Bao, R Tiberio, HSP Wong Alternative Lithographic Technologies V 8680, 176-184, 2013 | 40 | 2013 |
| Directed self-assembly (DSA) template pattern verification Z Xiao, Y Du, H Tian, MDF Wong, H Yi, HSP Wong, H Zhang Proceedings of the 51st Annual Design Automation Conference, 1-6, 2014 | 37 | 2014 |
| DSA-aware detailed routing for via layer optimization Y Du, Z Xiao, MDF Wong, H Yi, HSP Wong Alternative Lithographic Technologies VI 9049, 548-555, 2014 | 37 | 2014 |
| Computational simulation of block copolymer directed self-assembly in small topographical guiding templates H Yi, A Latypov, HSP Wong Alternative Lithographic Technologies V 8680, 358-364, 2013 | 35 | 2013 |
| Mandrel-based patterning: density multiplication techniques for 15nm nodes C Bencher, H Dai, L Miao, Y Chen, P Xu, Y Chen, S Oemardani, J Sweis, ... Optical Microlithography XXIV 7973, 187-196, 2011 | 32 | 2011 |
| Exploration of the directed self-assembly based nano-fabrication design space using computational simulations A Latypov, M Preil, G Schmid, J Xu, H Yi, K Yoshimoto, Y Zou Alternative Lithographic Technologies V 8680, 202-212, 2013 | 27 | 2013 |
| DSA template optimization for contact layer in 1D standard cell design Z Xiao, Y Du, H Tian, MDF Wong, H Yi, HSP Wong Alternative Lithographic Technologies VI 9049, 412-419, 2014 | 20 | 2014 |
| First demonstration of RRAM patterned by block copolymer self-assembly Y Wu, H Yi, Z Zhang, Z Jiang, J Sohn, S Wong, HSP Wong 2013 IEEE International Electron Devices Meeting, 20.8. 1-20.8. 4, 2013 | 20 | 2013 |
| Experimental study of sub-DSA resolution assist features (SDRAF) H Yi, J Bekaert, R Gronheid, G Vandenberghe, K Nafus, HSP Wong Alternative Lithographic Technologies VII 9423, 326-333, 2015 | 15 | 2015 |
| Contact pitch and location prediction for directed self-assembly template verification Z Xiao, Y Du, MDF Wong, H Yi, HSP Wong, H Zhang The 20th Asia and South Pacific Design Automation Conference, 644-651, 2015 | 15 | 2015 |
| Physical layout design of directed self-assembly guiding alphabet for IC contact hole/via patterning HSP Wong, H Yi, M Tung, K Okabe Proceedings of the 2015 Symposium on International Symposium on Physical …, 2015 | 9 | 2015 |
| Layout optimization and template pattern verification for directed self-assembly (dsa) Z Xiao, D Guo, MDF Wong, H Yi, MC Tung, HSP Wong Proceedings of the 52nd Annual Design Automation Conference, 1-6, 2015 | 8 | 2015 |
| Methods for fabricating integrated circuits including topographical features for directed self-assembly A Latypov, ETK Ching, H Yi US Patent 9,053,923, 2015 | 6 | 2015 |
