Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition BH Lee, B Yoon, VR Anderson, SM George The Journal of Physical Chemistry C 116 (5), 3250-3257, 2012 | 139 | 2012 |
Molybdenum Atomic Layer Deposition Using MoF6 and Si2H6 as the Reactants D Seghete, GB Rayner Jr, AS Cavanagh, VR Anderson, SM George Chemistry of Materials 23 (7), 1668-1678, 2011 | 73 | 2011 |
Growth and Properties of Hafnicone and HfO2/Hafnicone Nanolaminate and Alloy Films Using Molecular Layer Deposition Techniques BH Lee, VR Anderson, SM George ACS Applied Materials & Interfaces 6 (19), 16880-16887, 2014 | 57 | 2014 |
Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures N Nepal, VR Anderson, JK Hite, CR Eddy Jr Thin Solid Films 589, 47-51, 2015 | 46 | 2015 |
Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties BH Lee, VR Anderson, SM George Chemical Vapor Deposition 19 (46), 204-212, 2013 | 45 | 2013 |
Atomic layer deposition of platinum nanoparticles on titanium oxide and tungsten oxide using platinum (II) hexafluoroacetylacetonate and formalin as the reactants VR Anderson, N Leick, JW Clancey, KE Hurst, KM Jones, AC Dillon, ... The Journal of Physical Chemistry C 118 (17), 8960-8970, 2014 | 36 | 2014 |
Structural characterization of atomic layer deposited vanadium dioxide AC Kozen, H Joress, M Currie, VR Anderson, CR Eddy Jr, VD Wheeler The Journal of Physical Chemistry C 121 (35), 19341-19347, 2017 | 34 | 2017 |
Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering VR Anderson, N Nepal, SD Johnson, ZR Robinson, A Nath, AC Kozen, ... Journal of Vacuum Science & Technology A 35 (3), 2017 | 23 | 2017 |
Magnetic and structural properties of sintered bulk pucks and aerosol deposited films of Ti-doped barium hexaferrite for microwave absorption applications SD Johnson, CM Gonzalez, V Anderson, Z Robinson, HS Newman, ... Journal of Applied Physics 122 (2), 2017 | 19 | 2017 |
Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide VR Anderson, AS Cavanagh, AI Abdulagatov, ZM Gibbs, SM George Journal of Vacuum Science & Technology A 32 (1), 2014 | 17 | 2014 |
Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods N Nepal, VR Anderson, SD Johnson, BP Downey, DJ Meyer, A DeMasi, ... Journal of Vacuum Science & Technology A 35 (3), 2017 | 15 | 2017 |
Metalcone and metalcone/metal oxide alloys grown using atomic and molecular layer deposition BH Lee, VR Anderson, SM George ECS Transactions 41 (2), 131, 2011 | 15 | 2011 |
Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy DR Boris, VR Anderson, N Nepal, SD Johnson, ZR Robinson, AC Kozen, ... Journal of Vacuum Science & Technology A 36 (5), 2018 | 10 | 2018 |
Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering N Nepal, VR Anderson, SD Johnson, BP Downey, DJ Meyer, ... Journal of Vacuum Science & Technology A 37 (2), 2019 | 8 | 2019 |
In situ studies of low temperature atomic level processing of GaN surfaces for atomic layer epitaxial growth SG Rosenberg, C Wagenbach, VR Anderson, SD Johnson, N Nepal, ... Journal of Vacuum Science & Technology A 37 (2), 2019 | 7 | 2019 |
Universal conformal ultrathin dielectrics on epitaxial graphene enabled by a graphene oxide seed layer A Nath, BD Kong, AD Koehler, VR Anderson, VD Wheeler, KM Daniels, ... Applied Physics Letters 110 (1), 2017 | 7 | 2017 |
Metalcone and metalcone/metal oxide alloys grown using atomic & molecular layer deposition techniques BH Lee, VR Anderson, SM George Electrochemical Society Meeting Abstracts; The Electrochemical Society, Inc …, 2011 | 2 | 2011 |
Atomic layer epitaxy for quantum well nitride-based devices J Hite, N Nepal, VR Anderson, JA Freitas, MA Mastro, CR Eddy Quantum Sensing and Nano Electronics and Photonics XIII 9755, 157-162, 2016 | 1 | 2016 |
(Invited) A Surface Science Toolbox for Understanding Atomic Layer Epitaxy CR Eddy Jr, SG Rosenberg, JM Woodward, VR Anderson, SD Johnson, ... Electrochemical Society Meeting Abstracts 236, 1154-1154, 2019 | | 2019 |
Optimizing Process Parameters for Plasma Assisted Atomic Layer Deposition DR Boris, VD Wheeler, VR Anderson, N Nepal, SG Rosenberg, AC Kozen, ... Electrochemical Society Meeting Abstracts 232, 1101-1101, 2017 | | 2017 |