Cyrus Tabery
Cyrus Tabery
Electronics Design Automation, Intel
Verified email at intel.com
Title
Cited by
Cited by
Year
FinFET scaling to 10 nm gate length
B Yu, L Chang, S Ahmed, H Wang, S Bell, CY Yang, C Tabery, C Ho, ...
Digest. International Electron Devices Meeting,, 251-254, 2002
7522002
Method for forming multiple structures in a semiconductor device
B Yu, JX An, CE Tabery, HH Wang
US Patent 6,706,571, 2004
5572004
Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems
AR Pawloski, AY Abdo, GR Amblard, BM LaFontaine, I Lalovic, ...
US Patent 7,014,966, 2006
5082006
Method for forming fins in a FinFET device using sacrificial carbon layer
MS Buynoski, S Dakshina-Murthy, CE Tabery, HH Wang, CY Yang, B Yu
US Patent 6,645,797, 2003
2072003
Use of diamond as a hard mask material
RJ Huang, PA Fisher, CE Tabery
US Patent 6,673,684, 2004
1772004
Method of using amorphous carbon as spacer material in a disposable spacer process
DE Brown, PA Fisher, RJ Huang, RC Nguyen, CE Tabery
US Patent 6,559,017, 2003
1662003
Partially de-coupled core and periphery gate module process
JP Erhardt, H Kinoshita, C Tabery
US Patent 6,835,662, 2004
1522004
Use of amorphous carbon for gate patterning
PA Fisher, RJ Huang, CE Tabery
US Patent 7,015,124, 2006
1502006
Method of forming sub-lithographic spaces between polysilicon lines
SA Bell, PA Fisher, RC Nguyen, CE Tabery
US Patent 6,500,756, 2002
1292002
Method for forming multiple fins in a semiconductor device
B Yu, JX An, CE Tabery
US Patent 6,872,647, 2005
1092005
Double and triple gate MOSFET devices and methods for making same
MR Lin, JX An, Z Krivokapic, CE Tabery, HH Wang, B Yu
US Patent 8,222,680, 2012
922012
Method using planarizing gate material to improve gate critical dimension in semiconductor devices
SS Ahmed, CE Tabery, HH Wang, B Yu
US Patent 6,787,439, 2004
922004
Method for forming a fin in a finFET device
CY Yang, SS Ahmed, S Dakshina-Murthy, CE Tabery, HH Wang, B Yu
US Patent 6,787,854, 2004
852004
Gate array with multiple dielectric properties and method for forming same
GE William, A Halliyal, MR Lin, M Van Ngo, CE Tabery, CY Yang
US Patent 6,563,183, 2003
702003
Disposable hard mask for memory bitline scaling
JY Yang, JP Erhardt, C Tabery, W Qian, MT Ramsbey, J Park, T Kamal
US Patent 7,018,868, 2006
682006
The use of EUV lithography to produce demonstration devices
B LaFontaine, Y Deng, RH Kim, HJ Levinson, S McGowan, ...
Emerging Lithographic Technologies XII 6921, 69210P, 2008
652008
Method and system for metrology recipe generation and review and analysis of design, simulation and metrology results
C Tabery, C Haidinyak, TP Lukanc, L Capodieci, CP Babcock, HE Kim, ...
US Patent 7,207,017, 2007
642007
Finfet gate formation using reverse trim of dummy gate
S Dakshina-Murthy, Z Krivokapic, CE Tabery
US Patent 6,864,164, 2005
502005
Method of using amorphous carbon film as a sacrificial layer in replacement gate integration processes
SA Bell, S Dakshina-Murthy, PA Fisher, CE Tabery
US Patent 6,664,154, 2003
502003
Planar finFET patterning using amorphous carbon
CE Tabery, SA Bell, S Dakshina-Murthy
US Patent 6,605,514, 2003
472003
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