| Technology platform for the fabrication of titanium nanostructures S Ecoffey, M Guilmain, JF Morissette, F Bourque, J Pont, BL Sang, ... Journal of Vacuum Science & Technology B 29 (6), 2011 | 11 | 2011 |
| Tunable bandpass filter with serially coupled ring resonators assisted MZI N Kohli, BL Sang, F Nabki, M Ménard IEEE Photonics Journal 13 (4), 1-8, 2021 | 10 | 2021 |
| A fabrication process for emerging nanoelectronic devices based on oxide tunnel junctions D Drouin, G Droulers, M Labalette, B Lee Sang, P Harvey-Collard, ... Journal of Nanomaterials 2017, 2017 | 8 | 2017 |
| Inductively coupled plasma etching of ultra-shallow Si3N4 nanostructures using SF6/C4F8 chemistry BL Sang, MJ Gour, A Jaouad, S Ecoffey, M Darnon, B Sadani, A Souifi, ... Microelectronic Engineering 141, 68-71, 2015 | 6 | 2015 |
| Selective dry etching of TiN nanostructures over SiO2 nanotrenches using a Cl2/Ar/N2 inductively coupled plasma B Lee Sang, MJ Gour, M Darnon, S Ecoffey, A Jaouad, B Sadani, ... Journal of Vacuum Science & Technology B 34 (2), 2016 | 5 | 2016 |
| Selective dry etching of titanium nitride nanostructures with chlorine-based inductively coupled plasma BL Sang, MJ Gour, M Darnon, S Ecoffey, A Jaouad, B Sadani, A Souifi, ... 40th Micro and Nano Engineering Conference, 2014 | 2 | 2014 |
| A fabrication process for self-connected horizontal SiGe nanowires M Merhej, S Ecoffey, B Sadani, B Lee–Sang, T Baron, S David, D Drouin, ... Microelectronic Engineering 220, 111150, 2020 | 1 | 2020 |
| Serially coupled ring resonator-MZI based optical bandpass filter with wide bandwidth tunability N Kohli, BL Sang, F Nabki, M Ménard Integrated Photonics Research, Silicon and Nanophotonics, IM3A. 3, 2020 | | 2020 |
| Nanofabrication et integration 3D: La procédé Nanodamascene G Droulers, M Labalette, BL Sang, Y Ayadi, A Souifi, M Pioro-Ladriere, ... Entretiens Jacques Cartier–Objets connectés, 2016 | | 2016 |
| CMOS BEOL compatible process for the fabrication of single electron transistors, using TiN/Al2O3/TiNjunctions BL Sang, S Ecoffey, S Monfray, D Drouin 2nd International Conference on Micro and Nano Engineering, MNE, 2016 | | 2016 |
| CMOS BEOL compatible process for the fabrication of SET using TiN/Al2O3/TiN junctions BL Sang, S Ecoffey, D Drouin Micro/Nano Engineering, 2016 | | 2016 |
| The nanodamascene process: A versatile fabrication technique for nanoelectronic applications D Drouin, G Droulers, M Labalette, BL Sang, P Harvey-Collard, ... 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO), 1262-1266, 2015 | | 2015 |
| Inductively coupled plasma etching of ultra-shallow Si3N4 and SiO2 nanostructures BL Sang, A Jaouad, S Ecoffey, M Darnon, MJ Gour, B Sadani, A Souifi, ... 40th Micro and Nano Engineering Conference, 2014 | | 2014 |
| 3D integration of double gate single electron transistors in the CMOS Back-End-Of-Line for ultra-low power gas sensing Y Ayadi, BL Sang, B Sadani, K El Hajjam, S Ecoffey, F Calmon, A Souifi, ... | | |
| Integration of metallic single electron transistors on CMOS substrate BL Sang, K El Hajjam, Y Ayadi, S Ecoffey, B Sadani, A Souifi, F Calmon, ... | | |
