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Yantao Xia
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Atomic layer etching of metals with anisotropy, specificity, and selectivity
X Sang, Y Xia, P Sautet, JP Chang
Journal of Vacuum Science & Technology A 38 (4), 2020
152020
First-principles spectra of au nanoparticles: From quantum to classical absorption
S Hernandez, Y Xia, V Vlček, R Boutelle, R Baer, E Rabani, D Neuhauser
Molecular Physics 116 (19-20), 2506-2511, 2018
82018
Plasma oxidation of copper: molecular dynamics study with neural network potentials
Y Xia, P Sautet
ACS nano 16 (12), 20680-20692, 2022
62022
Thermodynamics of Atomic Layer Etching Chemistry on Copper and Nickel Surfaces from First Principles
Y Xia, P Sautet
Chemistry of Materials 33 (17), 6774-6786, 2021
42021
Glycolysis maintains AMPK activation in sorafenib-induced Warburg effect
S Guo, C Zhang, H Zeng, Y Xia, C Weng, Y Deng, L Wang, H Wang
Molecular Metabolism 77, 101796, 2023
22023
First Principles Study of Aluminum Doped Polycrystalline Silicon as a Potential Anode Candidate in Li-ion Batteries
SH Bhimineni
UCLA, 2024
2024
Self-limited Etching for Atomic Scale Surface Engineering of Metals: Understanding and Design
Y Xia
University of California, Los Angeles, 2023
2023
Directional and selective patterning of EUV absorbers
X Sang, Y Xia, JP Chang, P Sautet
Advanced Etch Technology and Process Integration for Nanopatterning X 11615 …, 2021
2021
Errata:“Atomic layer etching of metals with anisotropy, specificity, and selectivity”[J. Vac. Sci. Technol. A 38, 043005 (2020)]
X Sang, Y Xia, P Sautet, JP Chang
Journal of Vacuum Science & Technology A 39 (1), 2021
2021
Thermodynamic Screening of Reaction Chemistries for Atomic Layer Etching of Metals
Y Xia
University of California, Los Angeles, 2020
2020
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