Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment M Betawar, V Bhagwat, D Goradia, M Mehta, N Parekh US Patent 6,665,575, 2003 | 66 | 2003 |
Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment M Betawar, V Bhagwat, D Goradia, M Mehta, N Parekh US Patent 6,415,193, 2002 | 58 | 2002 |
Room temperature CNOT operation in a diluted magnetic semiconductor quantum dot MK Mehta, JT Andrews, P Sen Quantum Information Processing 20 (5), 194, 2021 | 2 | 2021 |
Quantum Entanglement in a Diluted Magnetic Semiconductor Quantum Dot MK Mehta, JT Andrews, P Sen arXiv preprint arXiv:2403.06522, 2024 | | 2024 |
Study of Microwave Assisted CNOT Gate MK Mehta, P Sen, JT Andrews arXiv preprint arXiv:2001.01928, 2020 | | 2020 |