Phase-controlled synthesis of SnOx thin films by atomic layer deposition and post-treatment BE Park, J Park, S Lee, S Lee, WH Kim, H Kim Applied Surface Science 480, 472-477, 2019 | 31 | 2019 |
Comparative study on atomic layer deposition of HfO 2 via substitution of ligand structure with cyclopentadiene S Park, BE Park, H Yoon, S Lee, T Nam, T Cheon, SH Kim, H Cheon, S Im, ... Journal of Materials Chemistry C 8 (4), 1344-1352, 2020 | 30 | 2020 |
Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition Y Lee, S Seo, IK Oh, S Lee, H Kim Ceramics International 45 (14), 17662-17668, 2019 | 20 | 2019 |
Hydrogen barrier performance of sputtered La2O3 films for InGaZnO thin-film transistor Y Lee, CH Lee, T Nam, S Lee, IK Oh, JY Yang, DW Choi, C Yoo, H Kim, ... Journal of materials science 54, 11145-11156, 2019 | 18 | 2019 |
Effects of Ar Addition to O2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films H Jung, IK Oh, CM Yoon, BE Park, S Lee, O Kwon, WJ Lee, SH Kwon, ... ACS applied materials & interfaces 10 (46), 40286-40293, 2018 | 17 | 2018 |