Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition R Samii, A Fransson, P Mpofu, P Niiranen, L Ojamäe, V Kessler, ... Inorganic Chemistry 61 (51), 20804-20813, 2022 | 3 | 2022 |
Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons P Niiranen, H Nadhom, M Zanáška, R Boyd, M Sortica, D Primetzhofer, ... Review of Scientific Instruments 94 (2), 2023 | 1 | 2023 |
Surface chemistry in atomic layer deposition of AlN thin films from Al (CH3) 3 and NH3 studied by mass spectrometry P Mpofu, H Hafdi, P Niiranen, J Lauridsen, O Alm, T Larsson, H Pedersen | | 2024 |
Plasma electron characterization in electron chemical vapor deposition P Niiranen, A Kapran, H Nadhom, M Čada, Z Hubička, H Pedersen, ... Journal of Vacuum Science & Technology A 42 (2), 2024 | | 2024 |
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition AH Choolakkal, P Niiranen, J Birch, H Pedersen | | 2024 |
Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons P Niiranen, H Nadhom, M Zanaska, R Boyd, M Sortica, D Primetzhofer, ... | | 2022 |