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Pentti Niiranen
Pentti Niiranen
PhD student
Verified email at liu.se
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Cited by
Year
Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition
R Samii, A Fransson, P Mpofu, P Niiranen, L Ojamäe, V Kessler, ...
Inorganic Chemistry 61 (51), 20804-20813, 2022
32022
Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons
P Niiranen, H Nadhom, M Zanáška, R Boyd, M Sortica, D Primetzhofer, ...
Review of Scientific Instruments 94 (2), 2023
12023
Surface chemistry in atomic layer deposition of AlN thin films from Al (CH3) 3 and NH3 studied by mass spectrometry
P Mpofu, H Hafdi, P Niiranen, J Lauridsen, O Alm, T Larsson, H Pedersen
2024
Plasma electron characterization in electron chemical vapor deposition
P Niiranen, A Kapran, H Nadhom, M Čada, Z Hubička, H Pedersen, ...
Journal of Vacuum Science & Technology A 42 (2), 2024
2024
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition
AH Choolakkal, P Niiranen, J Birch, H Pedersen
2024
Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons
P Niiranen, H Nadhom, M Zanaska, R Boyd, M Sortica, D Primetzhofer, ...
2022
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Articles 1–6