| Enhancement of bubble absorption process using a CNTs-ammonia binary nanofluid X Ma, F Su, J Chen, T Bai, Z Han International Communications in Heat and Mass Transfer 36 (7), 657-660, 2009 | 143 | 2009 |
| The role of copper pretreatment on the morphology of graphene grown by chemical vapor deposition TJ Gnanaprakasa, Y Gu, SK Eddy, Z Han, WJ Beck, K Muralidharan, ... Microelectronic Engineering 131, 1-7, 2015 | 30 | 2015 |
| Fundamentals and applications of sonic technology DPR Thanu, M Zhao, Z Han, M Keswani Developments in Surface Contamination and Cleaning: Applications of Cleaning …, 2019 | 23 | 2019 |
| Megasonic cleaning of blanket and patterned samples in carbonated ammonia solutions for enhanced particle removal and reduced feature damage Z Han, M Keswani, S Raghavan IEEE transactions on semiconductor manufacturing 26 (3), 400-405, 2013 | 21 | 2013 |
| Post-CMP cleaning M Keswani, Z Han Developments in Surface Contamination and Cleaning, 145-183, 2015 | 17 | 2015 |
| Brush Scrubbing for Post-CMP Cleaning T Sun, Z Han, M Keswani Developments in Surface Contamination and Cleaning: Methods for Surface …, 2017 | 12 | 2017 |
| Method and an apparatus for cleaning substrates U Dietze, JW Hsu, M Samoya, S Singh, H Shende, Z Han US Patent App. 15/075,257, 2017 | 7 | 2017 |
| Analysis of sonoluminescence signal from megasonic irradiated gas-containing aqueous solutions using replaceable single-band filters Z Han, M Keswani, E Liebscher, M Beck, S Raghavan ECS Journal of Solid State Science and Technology 3 (1), N3101, 2014 | 6 | 2014 |
| Tribological and Kinetic Characterization of 300-mm Copper Chemical Mechanical Planarization Process Z Han, Y Zhuang, Y Sampurno, A Meled, Y Jiao, X Wei, J Cheng, ... ECS Transactions 27 (1), 587, 2010 | 4 | 2010 |
| Towards expanding megasonic cleaning capability Z Han, B Ferstl, G Oetter, U Dietze, M Samayoa, D Dattilo 32nd European Mask and Lithography Conference 10032, 38-45, 2016 | 3 | 2016 |
| Detection of HO2•/O2•- Radicals Formed in Aqueous Solutions Irradiated with Megasonic Waves Using a Cavitation Threshold (CT) Cell Set-Up ZX Han, B Wu, I Brown, M Beck, S Raghavan Solid State Phenomena 219, 170-173, 2014 | 2 | 2014 |
| Advancements in pellicle glue residue removal D Dattilo, S Dietze, M Samayoa, U Dietze, V Dahl, Z Han Photomask Technology 2018 10810, 114-125, 2018 | 1 | 2018 |
| Characterization of Acoustic Cavitation from a Megasonic nozzle transducer for Photomask Cleaning N Candia, C Zanelli, J Brunner, J Straka, Z Han, S Howard, P Yam Photomask Technology 2017 10451, 295-303, 2017 | 1 | 2017 |
| Use of a Simple Cavitation Cell Set-Up with Replaceable Single Band Filters for Analysis of Sonoluminescence Signal from Megasonic Irradiated Gasified Aqueous Solutions Z Han, M Keswani, E Liebscher, M Beck, S Raghavan ECS Transactions 58 (6), 69, 2013 | 1 | 2013 |
| Particle removal and feature damage reduction using carbonated ammonia solutions for enhanced megasonic cleaning processes Z Han The University of Arizona, 2013 | 1 | 2013 |
| In-situ cavitation measurements with a wireless sensor array: applications in megasonic photomask cleaning N Candia, C Zanelli, Z Han, P Yam Photomask Technology 2022 12293, 72-78, 2022 | | 2022 |
| Estimation of the Generation Rate of H· Radicals in a Megasonic Field Using an Electrochemical Technique ZX Han, S Raghavan, M Beck Solid State Phenomena 314, 181-185, 2021 | | 2021 |
| Use of a Simple Cavitation Cell Set-Up With Replaceable Single Band Filters for Analysis of Sonoluminescence Signal From Megasonic Irradiated Gasified Aqueous Solutions S Raghavan, Z Han, M Keswani, M Beck, E Liebscher ECS Meeting Abstracts, 2104, 2013 | | 2013 |
