| Viscosity measurements of ammonia, R32, and R134a. Vapor buoyancy and radial acceleration in capillary viscometers A Laesecke, TOD Lüddecke, RF Hafer, DJ Morris International journal of thermophysics 20 (2), 401-434, 1999 | 62 | 1999 |
| Viscosity of fluorinated propane isomers. 2. Measurements of three compounds and model comparisons A Laesecke, RF Hafer Journal of Chemical & Engineering Data 43 (1), 84-92, 1998 | 52 | 1998 |
| Full-Wafer Voltage Contrast Inspection for Detection of BEOL Defects RF Hafer, OD Patterson, R Hahn, H Xiao IEEE Transactions on Semiconductor Manufacturing 28 (4), 461-468, 2015 | 44 | 2015 |
| Full-Wafer Voltage Contrast Inspection for Detection of BEOL Defects HX [3] R.F. Hafer, O.D. Patterson, R. Hahn IEEE Trans on Semiconductor Manufacturing, 2015 | 44 | 2015 |
| Saturated-liquid viscosity of ten binary and ternary alternative refrigerant mixtures. Part I: Measurements A Laesecke, RF Hafer, DJ Morris Journal of Chemical & Engineering Data 46 (2), 433-445, 2001 | 37 | 2001 |
| MST Best Paper Award for 2003: Extension of the torsional crystal viscometer to measurements in the time domain AL Richard F Hafer Measurement Science and Technology 14 (5), 663, 2003 | 19 | 2003 |
| Extension of the torsional crystal viscometer to measurements in the time domain RF Hafer, A Laesecke Measurement Science and Technology 14 (5), 663, 2003 | 19 | 2003 |
| Wide-ranging absolute viscosity measurements of sub-and supercritical 1, 1, 1-trifluoroethane (R143a) A Laesecke, K Meier, RF Hafer Journal of Molecular Liquids 251, 128-141, 2018 | 12 | 2018 |
| In-line characterization of EDRAM for a FINFET technology using VC inspection OD Patterson, R Hafer, S Mittal, A Arya, K Stein, H Ho, W Davies, X Tang, ... Advanced Semiconductor Manufacturing Conference (ASMC), 2016 27th Annual …, 2016 | 11 | 2016 |
| The merits of high landing energy for E-beam inspection OD Patterson, R Hafer, X Tang, SCC Lei Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual …, 2015 | 6 | 2015 |
| Solved: The mystery of bright voltage contrast word-line defects for SOI technology using Nanoprobing OD Patterson, RF Hafer, S Pendyala, Z Song, BYL Hsieh, X Tang Information and Communication Technology, Electronics and Microelectronics …, 2017 | 4 | 2017 |
| The Benefits of High Landing Energy for E-Beam Inspection OD Patterson, RF Hafer, X Tang, SCC Lei IEEE Transactions on Semiconductor Manufacturing 29 (4), 320-327, 2016 | 4 | 2016 |
| Full-wafer electron beam inspection for detection of BEOL defects RF Hafer, OD Patterson, R Hahn, H Xiao Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual …, 2014 | 4 | 2014 |
| Torsional crystal viscometry: wide ranging resonance measurements and feasibility study of transient-decay measurements RF Hafer University of Colorado, 1999 | 4 | 1999 |
| Chasing ghosts: How an SRAM detected the subtle impact of stray light S Lucarini, B Dirahoui, R Hafer, W Weng, L Safran, S Pendyala, K Barth, ... Advanced Semiconductor Manufacturing Conference (ASMC), 2017 28th Annual …, 2017 | 3 | 2017 |
| E-beam inspection throughput acceleration via targeted critical area inspection OD Patterson, RO Topaloglu, RF Hafer, SCC Lei, X Tang Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual …, 2015 | 3 | 2015 |
| Carbon in the presence of high oxygen levels in polysilicon: the effect on poly-to-poly dielectric breakdown RF Hafer, TS Moss Semiconductor science and technology 22 (3), 179, 2007 | 1 | 2007 |
| Electron beam inspection: CDU dual-mode inspection and lithography ghost image detection RF Hafer, OD Patterson, D McKindles, BYL Hsieh SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th …, 2018 | | 2018 |
| In-Line Detection of Deep Trench Moat Underetch Defects Using E-beam Inspection R Hafer 41st International Symposium for Testing and Failure Analysis (November 1–5 …, 2015 | | 2015 |
| E-beam Inspection Throughput Acceleration Via Targeted Critical Area Inspection RFH Oliver D. Patterson, Rasit O Topaloglu, XT Shuen-Cheng Chris Lei American Semiconductor Manufacturing Conference 2015, 2015 | | 2015 |
Xiaohu TangHermes Microvision Inc.Verified email at hermes-microvision.com
