| A Micro Inertial Energy Harvesting Platform With Self-Supplied Power Management Circuit for Autonomous Wireless Sensor Nodes EE Aktakka, K Najafi IEEE Journal of Solid State Circuits 49, 1-13, 2014 | 203 | 2014 |
| A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations T Galchev, EE Aktakka, K Najafi IEEE/ASME Journal of Microelectromechanical Systems 21, 1311-1320, 2012 | 139 | 2012 |
| Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting EE Aktakka, RL Peterson, K Najafi Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS …, 2011 | 129 | 2011 |
| Microsystems for energy harvesting K Najafi, T Galchev, EE Aktakka, RL Peterson, J McCullagh Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS …, 2011 | 97 | 2011 |
| Energy scavenging from insect flight EE Aktakka, H Kim, K Najafi Journal of Micromechanics and Microengineering 21 (9), 095016, 2011 | 77 | 2011 |
| A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon EE Aktakka, RL Peterson, K Najafi Electron Devices Meeting (IEDM), 2010 IEEE International, 31.5. 1-31.5. 4, 2010 | 70 | 2010 |
| A self-supplied inertial piezoelectric energy harvester with power-management IC EE Aktakka, RL Peterson, K Najafi Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2011 …, 2011 | 67 | 2011 |
| A piezoelectric frequency-increased power generator for scavenging low-frequency ambient vibration T Galchev, EE Aktakka, H Kim, K Najafi Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International …, 2010 | 48 | 2010 |
| A Microactuation and Sensing Platform With Active Lockdown for In Situ Calibration of Scale Factor Drifts in Dual-Axis Gyroscopes EE Aktakka, JW Woo, D Egert, RJM Gordenker, K Najafi Transactions on Mechatronics 20, 934-943, 2015 | 46 | 2015 |
| Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon EE Aktakka, RL Peterson, K Najafi Electron Devices, IEEE Transactions on 60 (6), 2022-2030, 2013 | 45 | 2013 |
| A 3-DOF Piezoelectric Micro Vibratory Stage based on Bulk-PZT/Silicon Crab-Leg Suspensions EE Aktakka, RL Peterson, K Najafi 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS …, 2013 | 33 | 2013 |
| Three-Axis Piezoelectric Vibration Energy Harvester EE Aktakka, K Najafi 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS …, 2015 | 31 | 2015 |
| On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration Y Chen, EE Aktakka, JK Woo, K Najafi, KR Oldham Mechatronics, 2018 | 29 | 2018 |
| Wafer level fabrication of high performance MEMS using bonded and thinned bulk piezoelectric substrates EE Aktakka, H Kim, K Najafi Solid-State Sensors, Actuators and Microsystems Conference, 2009 …, 2009 | 29 | 2009 |
| A six-axis micro platform for in situ calibration of MEMS inertial sensors EE Aktakka, K Najafi 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 26 | 2016 |
| Method of making a thin film device K Najafi, EE Aktakka, H Kim US Patent 8,209,857, 2012 | 26 | 2012 |
| Actuation And Sensing Platform For Sensor Calibration And Vibration Isolation K Najafi, E Aktakka US Patent App. 15/051,752, 2016 | 22 | 2016 |
| Post-CMOS FinFET Integration of Bismuth Telluride and Antimony Telluride Thin-Film-Based Thermoelectric Devices on SoI Substrate EE Aktakka, N Ghafouri, CE Smith, RL Peterson, MM Hussain, K Najafi Electron Device Letters 34, 1334-1336, 2013 | 20 | 2013 |
| Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage B Edamana, Y Chen, D Slavin, EE Aktakka, KR Oldham Transactions on Control Systems Technology, 2015 | 18 | 2015 |
| High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance EE Aktakka, RL Peterson, K Najafi IEEE/ASME Journal of Microelectromechanical Systems, 1-1, 2013 | 18 | 2013 |
Rebecca L (Becky) PetersonAssociate Professor of Electrical Engineering and Computer Science and Mat. Science & Eng.在 umich.edu 的電子郵件地址已通過驗證
