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Rohit Kothari
Rohit Kothari
Manager of Photolithography, Micron Technology
Verified email at mail.pse.umass.edu
Title
Cited by
Cited by
Year
Direct patterning of robust one-dimensional, two-dimensional, and three-dimensional crystalline metal oxide nanostructures using imprint lithography and nanoparticle dispersion …
R Kothari, MR Beaulieu, NR Hendricks, S Li, JJ Watkins
Chemistry of Materials 29 (9), 3908-3918, 2017
562017
Rheological study of order-to-disorder transitions and phase behavior of block copolymer–surfactant complexes containing hydrogen-bonded small molecule additives
R Kothari, HH Winter, JJ Watkins
Macromolecules 47 (22), 8048-8055, 2014
182014
Wavelength-Selective Three-Dimensional Thermal Emitters via Imprint Lithography and Conformal Metallization
S Li, A Kazemi-Moridani, Y Zhou, IR Howell, R Kothari, JH Lee, ...
ACS applied materials & interfaces 10 (9), 8173-8179, 2018
92018
Patterning of nanostructures using imprint lithography
JJ Watkins, R Kothari
US Patent App. 16/315,442, 2019
52019
Direct imprint patterning of 2-D and 3-D nanoparticle/polymer hybrid and crystalline metal oxide structures for printed optical, electronic, and energy devices
R Kothari, I Howell, Y Zhou, NR Hendricks, MR Beaulieu, JJ Watkins
2016 6th Electronic System-Integration Technology Conference (ESTC), 1-2, 2016
52016
Methods of forming staircase structures
R Kothari, JC McFarland, J Reece, DA Kewley, AL Olson
US Patent 10,600,796, 2020
42020
Mesoporous silica/nanoparticle composites prepared by 3-D replication of highly filled block copolymer templates
NR Hendricks, R Kothari, X Wang, JJ Watkins
Journal of Materials Chemistry C 2 (29), 5938-5943, 2014
42014
Methods of forming a semiconductor device
R Kothari, AL Olson, JD Hopkins, JJ Wu
US Patent 11,127,691, 2021
22021
Integrated assemblies
R Kothari, L Xu, J Li
US Patent 11,239,181, 2022
12022
Semiconductor devices comprising steps
R Kothari, AL Olson, JD Hopkins, JJ Wu
US Patent 11,916,024, 2024
2024
Methods of forming a staircase structure
R Kothari, JC McFarland, J Reece, DA Kewley, AL Olson
US Patent App. 18/332,919, 2023
2023
Electronic devices comprising overlay marks
R Kothari, HN Jain, JD Hopkins, X Zhang
US Patent App. 18/168,483, 2023
2023
Methods of forming a staircase structure
R Kothari, JC McFarland, J Reece, DA Kewley, AL Olson
US Patent 11,678,481, 2023
2023
Integrated assemblies
R Kothari, L Xu, J Li
US Patent 11,658,132, 2023
2023
Electronic devices comprising overlay marks, memory devices comprising overlay marks, and related methods
R Kothari, HN Jain, JD Hopkins, X Zhang
US Patent 11,581,264, 2023
2023
Methods of improving adhesion of photoresist in a staircase structure and methods of forming a staircase structure
R Kothari, JC McFarland, J Reece, DA Kewley, AL Olson
US Patent 10,930,659, 2021
2021
Fabrication of Gold-coated 3-D Woodpile Structures for Mid-IR Thermal Emitters
S Li, A Moridani, R Kothari, JH Lee, J Watkins
APS March Meeting Abstracts 2017, R34. 011, 2017
2017
(I) Polymer Nanocomposites: Rheology and Processing for Mesoporous Materials and (II) Nanopatterning of Metal Oxides Using Soft Lithography
R Kothari
2016
Layer by Layer Fabrication of 3D Photonic Crystals by Substrate Conformal Imprint Lithography (SCIL) from Titania Nanoparticle Solutions
I Howell, M Verschuuren, R Kothari, J Watkins
Bulletin of the American Physical Society 60, 2015
2015
Rheology and Phase Transitions in Highly Filled Additive/Block Copolymer Composites
BM Yavitt, R Kothari, HH Winter, JJ Watkins
APS March Meeting Abstracts 2015, P1. 288, 2015
2015
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