| Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS J Patidar, A Sharma, S Zhuk, G Lorenzin, C Cancellieri, MF Sarott, ... Surface and Coatings Technology 468, 129719, 2023 | 17 | 2023 |
| Influence of amorphous carbon interlayers on nucleation and early growth of lithium metal at the current collector-solid electrolyte interface MH Futscher, T Amelal, J Sastre, A Müller, J Patidar, A Aribia, K Thorwarth, ... Journal of Materials Chemistry A 10 (29), 15535-15542, 2022 | 11 | 2022 |
| Combinatorial Reactive Sputtering with Auger Parameter Analysis Enables Synthesis of Wurtzite Zn2TaN3 S Zhuk, A Wieczorek, A Sharma, J Patidar, K Thorwarth, J Michler, S Siol Chemistry of Materials 35 (17), 7069-7078, 2023 | 6 | 2023 |
| Reducing the oxygen contamination in conductive (Ti, Zr) N coatings via RF-bias assisted reactive sputtering K Thorwarth, M Watroba, O Pshyk, S Zhuk, J Patidar, J Schwiedrzik, ... arXiv preprint arXiv:2405.07789, 2024 | | 2024 |
| Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS--from combinatorial screening to piezoelectric devices J Patidar, K Thorwarth, T Schmitz-Kempen, R Kessels, S Siol arXiv preprint arXiv:2405.00210, 2024 | | 2024 |
| Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects OV Pshyk, J Patidar, S Siol arXiv preprint arXiv:2403.10385, 2024 | | 2024 |
| Deposition Condition at Low Temperature for Crystallization Enhancement of YSZ Films on Glass Substrates by Reactive Sputtering J Patidar, S Horita 2020 27th International Workshop on Active-Matrix Flatpanel Displays and …, 2020 | | 2020 |
| Fabrication of ferroelectric hafnium-zirconium dioxide thin films by solution process M Mohit, J Patidar, KI Haga, E Tokumitsu JSAP Annual Meetings Extended Abstracts The 67th JSAP Spring Meeting 2020 …, 2020 | | 2020 |
| Experimental and analytical studies on a foam insulated rigid type transfer line for use with liquid nitrogen J Patidar, RA Sumanth, U Behera, S Kasthurirengan IOP Conference Series: Materials Science and Engineering 171 (1), 012087, 2017 | | 2017 |
Sebastian SiolGroup Leader, Empa - Swiss Federal Laboratories for Materials Science and TechnologyVerified email at empa.ch
