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Yoona Park
Yoona Park
Samsung Display Co., Ltd.
Verified email at samsung.com
Title
Cited by
Cited by
Year
Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM
S Park, Y Jang, T Cha, Y Noh, Y Choi, J Lee, J Seong, B Kim, T Cho, ...
Physics of Plasmas 27 (8), 2020
122020
Plasma information-based virtual metrology (PI-VM) and mass production process control
S Park, J Seong, Y Jang, HJ Roh, JW Kwon, J Lee, S Ryu, J Song, ...
Journal of the Korean Physical Society 80 (8), 647-669, 2022
82022
Micro-range uniformity control of the etching profile in the OLED display mass production referring to the PI-VM model
S Park, J Seong, Y Noh, Y Park, Y Jang, T Cho, JH Yang, GH Kim
Physics of Plasmas 28 (10), 2021
52021
Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM
S Park, J Seong, Y Park, Y Noh, H Lee, N Bae, KB Roh, R Seo, B Song, ...
Plasma Physics and Controlled Fusion 66 (2), 025014, 2024
2024
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Articles 1–4