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Sofie Beyne
Sofie Beyne
KU Leuven / imec
Verified email at imec.be
Title
Cited by
Cited by
Year
Interconnect metals beyond copper: Reliability challenges and opportunities
K Croes, C Adelmann, CJ Wilson, H Zahedmanesh, OV Pedreira, C Wu, ...
2018 IEEE International Electron Devices Meeting (IEDM), 5.3. 1-5.3. 4, 2018
732018
Sub-100 nm2 Cobalt Interconnects
S Dutta, S Beyne, A Gupta, S Kundu, S Van Elshocht, H Bender, ...
IEEE Electron Device Letters 39 (5), 731-734, 2018
702018
1/f noise measurements for faster evaluation of electromigration in advanced microelectronics interconnections
S Beyne, K Croes, I De Wolf, Z Tőkei
Journal of Applied Physics 119 (18), 2016
362016
Electromigration activation energies in alternative metal interconnects
S Beyne, OV Pedreira, H Oprins, I De Wolf, Z Tőkei, K Croes
IEEE Transactions on Electron Devices 66 (12), 5278-5283, 2019
302019
The first observation of p-type electromigration failure in full ruthenium interconnects
S Beyne, S Dutta, OV Pedreira, N Bosman, C Adelmann, I De Wolf, ...
2018 ieee international reliability physics symposium (irps), 6D. 7-1-6D. 7-9, 2018
172018
Low-frequency noise and defects in copper and ruthenium resistors
DM Fleetwood, S Beyne, R Jiang, SE Zhao, P Wang, S Bonaldo, ...
Applied Physics Letters 114 (20), 2019
162019
A novel electromigration characterization method based on low-frequency noise measurements
S Beyne, O Varela Pedreira, I De Wolf, Z Tokei, K Croes
Semiconductor Science and Technology, 2019
92019
Study of the enhanced electromigration performance of Cu(Mn) by low-frequency noise measurements and atom probe tomography
S Beyne, L Arnoldi, I De Wolf, Z Tokei, K Croes
Applied Physics Letters 111 (8), 083105, 2017
92017
Understanding EM-degradation mechanisms in metal heaters used for Si photonics applications
K Croes, V Simons, S Beyne, V Cherman, H Oprins, M Stucchi, P Absil, ...
2019 IEEE International Reliability Physics Symposium (IRPS), 1-4, 2019
82019
IEEE Trans. on Electron Devices
S Beyne, OV Pedreira, H Oprins, I De Wolf, Z Tökei, K Croes
IEEE Trans. on Electron Devices 66 (12), 5278-5283, 2019
72019
Demonstration of low-frequency noise measurements for studying electromigration mechanisms in advanced nano-scaled interconnects
S Beyne, K Croes, I De Wolf, Z Tokei
2017 International Conference on Noise and Fluctuations, 1-4, 2017
6*2017
Fluctuation Scaling in metals
S Beyne, T Beyne
2017 International Conference on Noise and Fluctuations (ICNF), 1-4, 2017
62017
1/f Noise measurements for faster electromigration characterization
S Beyne, K Croes, I De Wolf, Z Tokei
2016 IEEE International Reliability Physics Symposium (IRPS), 2016
62016
Direct Correlation between Low-Frequency Noise Measurements and Electromigration Lifetimes
S Beyne, K Croes, I De Wolf, Z Tokei
International Reliability Physics Symposium (IPRS) 2017, 6B-3.1 - 6B-3.8, 2017
52017
On the design of an automated system for the characterization of the electromigration performance of advanced interconnects by means of low-frequency noise measurements
G Scandurra, S Beyne, G Giusi, C Ciofi
Metrology and Measurement Systems, 13-21-13-21, 2019
42019
Study of electromigration mechanisms in 22nm half-pitch Cu interconnects by 1/f noise measurements
S Beyne, K Croes, MH van der Veen, O Varela Pedreira, Q Qi, I De Wolf, ...
2017 IEEE International Interconnect Technology Conference (IITC), 1-3, 2017
42017
Electromigration activation energies in ruthenium interconnects
S Beyne, O Varela Pedreira, H Oprins, I De Wolf, Z Tokei, K Croes
32019
Electromigration mechanisms in scaled interconnects
S Beyne
32019
Experimental validation of electromigration by low frequency noise measurement for advanced copper interconnects application
BJ Tang, K Croes, E Simoen, S Beyne, C Adelmann, Z Tőkei
2015 International Conference on Noise and Fluctuations (ICNF), 1-4, 2015
32015
Brick-wall antenna fed by CPW
EA Soliman, S Beyne, S Brebels, G Vandenbosch
IEEE Antennas and Propagation Society International Symposium. 1998 Digest …, 1998
31998
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Articles 1–20