Interconnect metals beyond copper: Reliability challenges and opportunities K Croes, C Adelmann, CJ Wilson, H Zahedmanesh, OV Pedreira, C Wu, ... 2018 IEEE International Electron Devices Meeting (IEDM), 5.3. 1-5.3. 4, 2018 | 73 | 2018 |
Sub-100 nm2 Cobalt Interconnects S Dutta, S Beyne, A Gupta, S Kundu, S Van Elshocht, H Bender, ... IEEE Electron Device Letters 39 (5), 731-734, 2018 | 70 | 2018 |
1/f noise measurements for faster evaluation of electromigration in advanced microelectronics interconnections S Beyne, K Croes, I De Wolf, Z Tőkei Journal of Applied Physics 119 (18), 2016 | 36 | 2016 |
Electromigration activation energies in alternative metal interconnects S Beyne, OV Pedreira, H Oprins, I De Wolf, Z Tőkei, K Croes IEEE Transactions on Electron Devices 66 (12), 5278-5283, 2019 | 30 | 2019 |
The first observation of p-type electromigration failure in full ruthenium interconnects S Beyne, S Dutta, OV Pedreira, N Bosman, C Adelmann, I De Wolf, ... 2018 ieee international reliability physics symposium (irps), 6D. 7-1-6D. 7-9, 2018 | 17 | 2018 |
Low-frequency noise and defects in copper and ruthenium resistors DM Fleetwood, S Beyne, R Jiang, SE Zhao, P Wang, S Bonaldo, ... Applied Physics Letters 114 (20), 2019 | 16 | 2019 |
A novel electromigration characterization method based on low-frequency noise measurements S Beyne, O Varela Pedreira, I De Wolf, Z Tokei, K Croes Semiconductor Science and Technology, 2019 | 9 | 2019 |
Study of the enhanced electromigration performance of Cu(Mn) by low-frequency noise measurements and atom probe tomography S Beyne, L Arnoldi, I De Wolf, Z Tokei, K Croes Applied Physics Letters 111 (8), 083105, 2017 | 9 | 2017 |
Understanding EM-degradation mechanisms in metal heaters used for Si photonics applications K Croes, V Simons, S Beyne, V Cherman, H Oprins, M Stucchi, P Absil, ... 2019 IEEE International Reliability Physics Symposium (IRPS), 1-4, 2019 | 8 | 2019 |
IEEE Trans. on Electron Devices S Beyne, OV Pedreira, H Oprins, I De Wolf, Z Tökei, K Croes IEEE Trans. on Electron Devices 66 (12), 5278-5283, 2019 | 7 | 2019 |
Demonstration of low-frequency noise measurements for studying electromigration mechanisms in advanced nano-scaled interconnects S Beyne, K Croes, I De Wolf, Z Tokei 2017 International Conference on Noise and Fluctuations, 1-4, 2017 | 6* | 2017 |
Fluctuation Scaling in metals S Beyne, T Beyne 2017 International Conference on Noise and Fluctuations (ICNF), 1-4, 2017 | 6 | 2017 |
1/f Noise measurements for faster electromigration characterization S Beyne, K Croes, I De Wolf, Z Tokei 2016 IEEE International Reliability Physics Symposium (IRPS), 2016 | 6 | 2016 |
Direct Correlation between Low-Frequency Noise Measurements and Electromigration Lifetimes S Beyne, K Croes, I De Wolf, Z Tokei International Reliability Physics Symposium (IPRS) 2017, 6B-3.1 - 6B-3.8, 2017 | 5 | 2017 |
On the design of an automated system for the characterization of the electromigration performance of advanced interconnects by means of low-frequency noise measurements G Scandurra, S Beyne, G Giusi, C Ciofi Metrology and Measurement Systems, 13-21-13-21, 2019 | 4 | 2019 |
Study of electromigration mechanisms in 22nm half-pitch Cu interconnects by 1/f noise measurements S Beyne, K Croes, MH van der Veen, O Varela Pedreira, Q Qi, I De Wolf, ... 2017 IEEE International Interconnect Technology Conference (IITC), 1-3, 2017 | 4 | 2017 |
Electromigration activation energies in ruthenium interconnects S Beyne, O Varela Pedreira, H Oprins, I De Wolf, Z Tokei, K Croes | 3 | 2019 |
Electromigration mechanisms in scaled interconnects S Beyne | 3 | 2019 |
Experimental validation of electromigration by low frequency noise measurement for advanced copper interconnects application BJ Tang, K Croes, E Simoen, S Beyne, C Adelmann, Z Tőkei 2015 International Conference on Noise and Fluctuations (ICNF), 1-4, 2015 | 3 | 2015 |
Brick-wall antenna fed by CPW EA Soliman, S Beyne, S Brebels, G Vandenbosch IEEE Antennas and Propagation Society International Symposium. 1998 Digest …, 1998 | 3 | 1998 |