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Jianwei Peng
Jianwei Peng
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Title
Cited by
Cited by
Year
Nanosheet transistor with improved inner spacer
R Xie, K Cheng, N Loubet, X Miao, P Montanini, J Zhang, H Huang, ...
US Patent App. 15/703,221, 2019
312019
Multi-phase source/drain/gate spacer-epi formation
P Jianwei, X Wu, H Yu, Z Lun
US Patent 9,337,306, 2016
312016
Improved carrier injection in gate-all-around Schottky barrier silicon nanowire field-effect transistors
JW Peng, SJ Lee, GC Liang, N Singh, SY Zhu, GQ Lo, DL Kwong
Applied Physics Letters 93 (7), 2008
312008
CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
JW Peng, N Singh, GQ Lo, DL Kwong, SJ Lee
Proc. IEEE Int. Devices Meeting, 38.32, 2009
222009
In-Situ Boron Doped SiGe Epitaxy Optimization for FinFET Source/Drain
Yi Qi, Jianwei Peng, Hsien-Ching Lo, Judson Robert Holt, Michael Willemann ...
ECS Transactions 75 (8), 265-272, 2016
202016
Germanium nanowire metal–oxide–semiconductor field-effect transistor fabricated by complementary-metal–oxide–semiconductor-compatible process
JW Peng, N Singh, GQ Lo, M Bosman, CM Ng, SJ Lee
IEEE transactions on electron devices 58 (1), 74-79, 2010
142010
Source/drain eSiGe engineering for FinFET technology
J Peng, Y Qi, HC Lo, P Zhao, C Yong, J Yan, X Dou, H Zhan, Y Shen, ...
Semiconductor Science and Technology 32 (9), 094004, 2017
132017
Hybrid low‐k spacer scheme for advanced FinFET technology parasitic capacitance reduction
M Gu, X Wang, W Li, M Aquilino, J Peng, H Wang, D Jaeger, K Tabakman, ...
Electronics Letters 56 (10), 514-516, 2020
122020
Multi-layer spacer used in finFET
P Jianwei, H Yu, Z Lun, T Han, HC Lo, B Banerjee, WZ Gao, ...
US Patent 9,419,101, 2016
112016
A 12nm FinFET technology featuring 2nd generation FinFET for low power and high performance applications
HC Lo, D Choi, Y Hu, Y Shen, Y Qi, J Peng, D Zhou, M Mohan, C Yong, ...
2018 IEEE Symposium on VLSI Technology, 215-216, 2018
102018
FinFET conformal junction and high EPI surface dopant concentration method and device
P Feng, P Jianwei, Y Liu, SM Pandey, F Benistant
US Patent 9,406,752, 2016
102016
Metal-insulator-metal capacitors with enlarged contact areas
S Gu, P Jianwei, X Wu, Y Qi, J Chee
US Patent 10,446,483, 2019
92019
Method of forming a vertical field effect transistor (VFET) and a VFET structure
Y Qi, P Jianwei, HC Lo, R Xie, X Zhang, H Zang
US Patent 10,276,689, 2019
92019
Multiple gate length device with self-aligned top junction
H Zang, P Jianwei, Y Qi, HC Lo, J Ciavatti, R Xie
US Patent 10,410,929, 2019
82019
Methods of forming EPI semiconductor material on the source/drain regions of a FinFET device
Y Qi, HC Lo, P Jianwei, S Yanping, H Zhan
US Patent 9,887,094, 2018
82018
Multiple-layer spacers for field-effect transistors
T Han, Z Hu, J Liu, HC Lo, P Jianwei
US Patent 9,947,769, 2018
72018
Introducing material with a lower etch rate to form a t-shaped sdb sti structure
P Jianwei, X Wu
US Patent App. 15/078,247, 2017
72017
Abnormal silicon-germanium (SiGe) epitaxial growth in FinFETs
TS Bhat, S Shintri, B Chen, HC Lo, J Peng, Y Qi, M Willeman, SK Mishra, ...
IEEE Transactions on Semiconductor Manufacturing 33 (2), 291-294, 2020
52020
A novel approach to control source/drain cavity profile for device performance improvement
HC Lo, J Peng, E Reis, B Zhu, W Ma, SY Mun, S Shintri, EM Bazizi, ...
IEEE Transactions on Electron Devices 65 (9), 3640-3645, 2018
52018
Dual-curvature cavity for epitaxial semiconductor growth
A Vinslava, HC Lo, Y Shi, P Jianwei, J Yan, Y Qi
US Patent 10,297,675, 2019
42019
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