RF inductors with suspended and copper coated thick crystalline silicon spirals for monolithic MEMS LC circuits W Wu, F Huang, Y Li, S Zhang, X Han, Z Li, Y Hao, Y Wang IEEE Microwave and wireless components letters 15 (12), 853-855, 2005 | 22 | 2005 |
An integrated piezoelectric zinc oxide nanowire micro-energy harvester Y Li, Z Çelik-Butler, DP Butler Nano Energy 26, 456-465, 2016 | 20 | 2016 |
A hybrid electrostatic micro-harvester incorporating in-plane overlap and gap closing mechanisms Y Li, Z Çelik-Butler, DP Butler Journal of Micromechanics and Microengineering 3, 1-10, 2015 | 19 | 2015 |
Electroless copper plating applicable for bulk-silicon micromachined radio frequency inductor X Han, W Wu, Y Li, Z Li, Y Hao, G Yan Thin solid films 515 (4), 2607-2611, 2006 | 9 | 2006 |
Design and optimization of an electrostatic micro-harvester for sensors applications Y Li, Z Çelik-Butler, DP Butler SENSORS, 2013 IEEE, 1-4, 2013 | 3 | 2013 |
Electrostatic and piezoelectric micro energy harvesters for environmental vibrational energy scavenging Y Li The University of Texas at Arlington, 2015 | 2 | 2015 |
Electroless copper and nickel plating on single-crystal silicon for MEMS appliations H Xiang, L Yi, W Wengang Chinese Journal of Semiconductors 26 (5), 1059, 2005 | 2 | 2005 |
A piezoelectric micro-energy harvester for nanosensors Y Li, Z Çelik-Butler, DP Butler 2015 IEEE SENSORS, 1-4, 2015 | 1 | 2015 |
Electroless copper and nickel plating on single-crystal silicon for MEMS applications. X Han, Y Li, W Wu, G Yan, Y Hao Bandaoti Xuebao(Chin. J. Semicond.) 26 (5), 1059-1064, 2005 | 1 | 2005 |
MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating W Wengang, L Yi, H Fengyi, H Xiang, Z Shaoyong, L Zhihong, H Yilong Journal of Semiconductors 27 (4), 662-666, 2006 | | 2006 |
Combination of MEMS processing and electroless copper plating for a novel RF inductor Y Li, WG Wu, YL Hao Proceedings. 7th International Conference on Solid-State and Integrated …, 2004 | | 2004 |
Electroless copper plating on silicon surface for MEMS Y Li, Z Li, Y Hao, G Yan, WG Wu, X Han Proceedings. 7th International Conference on Solid-State and Integrated …, 2004 | | 2004 |