Influence of temperature on atomic layer epitaxial growth of indium nitride assessed with in situ grazing incidence small-angle x-ray scattering JM Woodward, SG Rosenberg, AC Kozen, N Nepal, SD Johnson, ... Journal of Vacuum Science & Technology A 37 (3), 2019 | 7 | 2019 |
Crystallization Behavior of Zinc-Doped Nb2O5 Thin Films Synthesized by Atomic Layer Deposition AC Kozen, JM Woodward, LB Ruppalt, H Cho, CA Ventrice Jr, AH Rowley, ... ACS Applied Electronic Materials 4 (9), 4280-4287, 2022 | 2 | 2022 |
Studying the Crystallization of ALD-Deposited Doped Nb2O5 into NbO2 for Next Generation Electronics Applications N Zhe, A Rowley, N Morabito, Z Robinson, A Kozen, L Ruppalt Bulletin of the American Physical Society 65, 2020 | | 2020 |
Annealing and Characterization of Niobium Oxide Films Deposited With Atomic Layer Deposition A Rowley, Z Robinson, A Kozen, M Twigg, S Prokes APS March Meeting Abstracts 2019, B67. 006, 2019 | | 2019 |