Follow
Xiaolei Wang
Xiaolei Wang
Institute of Microelectronics of Chinese Academy of Sciences
Verified email at ime.ac.cn
Title
Cited by
Cited by
Year
Physical origin of dipole formation at high-k/SiO2 interface in metal-oxide-semiconductor device with high-k/metal gate structure
X Wang, K Han, W Wang, S Chen, X Ma, D Chen, J Zhang, J Du, Y Xiong, ...
Applied Physics Letters 96 (15), 2010
572010
Investigation of TiAlC by atomic layer deposition as N type work function metal for FinFET
J Xiang, T Li, Y Zhang, X Wang, J Gao, H Cui, H Yin, J Li, W Wang, Y Ding, ...
ECS Journal of Solid State Science and Technology 4 (12), P441, 2015
352015
Comprehensive understanding of the effect of electric dipole at high-k/SiO2 interface on the flatband voltage shift in metal-oxide-semiconductor device
X Wang, K Han, W Wang, X Ma, D Chen, J Zhang, J Du, Y Xiong, ...
Applied Physics Letters 97 (6), 2010
332010
Experimental Extraction and Simulation of Charge Trapping During Endurance of FeFET With TiN/HfZrO/SiO2/Si (MFIS) Gate Structure
S Zhao, F Tian, H Xu, J Xiang, T Li, J Chai, J Duan, K Han, X Wang, ...
IEEE Transactions on Electron Devices 69 (3), 1561-1567, 2022
322022
Experimental investigation on oxidation kinetics of germanium by ozone
X Wang, Z Zhao, J Xiang, W Wang, J Zhang, C Zhao, T Ye
Applied Surface Science 390, 472-480, 2016
322016
Investigation of N type metal TiAlC by thermal atomic layer deposition using TiCl4 and TEA as precursors
J Xiang, Y Ding, L Du, C Xu, T Li, X Wang, J Li, C Zhao
ECS Journal of Solid State Science and Technology 5 (5), P299, 2016
302016
Band alignment of HfO2 on SiO2/Si structure
X Wang, K Han, W Wang, J Xiang, H Yang, J Zhang, X Ma, C Zhao, ...
Applied Physics Letters 100 (12), 2012
292012
Impact of Interlayer and Ferroelectric Materials on Charge Trapping During Endurance Fatigue of FeFET With TiN/HfxZr1-xO2/Interlayer/Si (MFIS) Gate Structure
F Tian, S Zhao, H Xu, J Xiang, T Li, W Xiong, J Duan, J Chai, K Han, ...
IEEE Transactions on Electron Devices 68 (11), 5872-5878, 2021
262021
Investigation on the dominant key to achieve superior Ge surface passivation by GeOx based on the ozone oxidation
X Wang, J Xiang, W Wang, Y Xiong, J Zhang, C Zhao
Applied Surface Science 357, 1857-1862, 2015
242015
Semiconductor device
W Wang, S Chen, HAN Kai, X Wang, D Chen
US Patent App. 13/061,555, 2011
182011
Understanding the role of TiN barrier layer on electrical performance of MOS device with ALD-TiN/ALD-TiAlC metal gate stacks
J Xiang, T Li, X Wang, K Han, J Li, C Zhao
ECS Journal of Solid State Science and Technology 5 (6), P327, 2016
172016
Dependence of electrostatic potential distribution of Al2O3/Ge structure on Al2O3 thickness
X Wang, J Xiang, W Wang, C Zhao, J Zhang
Surface Science 651, 94-99, 2016
162016
Remote interfacial dipole scattering and electron mobility degradation in Ge field-effect transistors with GeOx/Al2O3 gate dielectrics
X Wang, J Xiang, S Wang, W Wang, C Zhao, T Ye, Y Xiong, J Zhang
Journal of Physics D: Applied Physics 49 (25), 255104, 2016
162016
A possible origin of core-level shift in SiO2/Si stacks
X Wang, J Xiang, W Wang, J Zhang, K Han, H Yang, X Ma, C Zhao, ...
Applied Physics Letters 102 (4), 2013
152013
A polarization-switching, charge-trapping, modulated arithmetic logic unit for in-memory computing based on ferroelectric fin field-effect transistors
Z Zhang, Y Luo, Y Cui, H Yang, Q Zhang, G Xu, Z Wu, J Xiang, Q Liu, ...
ACS Applied Materials & Interfaces 14 (5), 6967-6976, 2022
132022
Semiconductor device and method of manufacturing the same
W Wang, HAN Kai, S Chen, X Wang, D Chen
US Patent 8,507,991, 2013
132013
First-principles study of oxygen vacancy defects in orthorhombic Hf0. 5Zr0. 5O2/SiO2/Si gate stack
J Chai, H Xu, J Xiang, Y Zhang, L Zhou, S Zhao, F Tian, J Duan, K Han, ...
Journal of Applied Physics 132 (10), 2022
122022
Understanding frequency dependence of trap generation under AC negative bias temperature instability stress in Si p-FinFETs
L Zhou, Q Zhang, H Yang, Z Ji, Z Zhang, Q Liu, H Xu, B Tang, E Simoen, ...
IEEE Electron Device Letters 41 (7), 965-968, 2020
122020
Investigation of thermal atomic layer deposited TiAlX (X= N or C) film as metal gate
J Xiang, Y Zhang, T Li, X Wang, J Gao, H Yin, J Li, W Wang, Y Ding, C Xu, ...
Solid-State Electronics 122, 64-69, 2016
122016
Reexamination of band offset transitivity employing oxide heterojunctions
X Wang, J Xiang, W Wang, J Zhang, K Han, H Yang, X Ma, C Zhao, ...
Applied Physics Letters 102 (3), 2013
122013
The system can't perform the operation now. Try again later.
Articles 1–20