Boron trichloride plasma treatment effect on ohmic contact resistance formed on GaN-based epitaxial structure AA Kobelev, YV Barsukov, NA Andrianov, AS Smirnov Journal of Physics: Conference Series 586 (1), 012013, 2015 | 15 | 2015 |
Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation YV Barsukov, V Volynets, AA Kobelev, NA Andrianov, AV Tulub, ... Journal of Vacuum Science & Technology A 36 (6), 2018 | 14 | 2018 |
Influence of surface processing in a BCl3 plasma on the formation of ohmic contacts to AlGaN/GaN structures NA Andrianov, AA Kobelev, AS Smirnov, YV Barsukov, YM Zhukov Technical Physics 62, 436-440, 2017 | 7 | 2017 |
Boron trichloride dry etching A Kobelev, N Andrianov, A Smirnov, Y Barsukov Encyclopedia of Plasma Technology-Two Volume Set, 193-202, 2016 | 7 | 2016 |
Влияние обработки поверхности в BCl плазме на формирование омических контактов к структурам AlGaN/GaN НА Андрианов, АА Кобелев, АС Смирнов, ЮВ Барсуков, ЮМ Жуков Журнал технической физики 87 (3), 413-418, 2017 | 4 | 2017 |
Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips A Fuchsluger, A De Pastina, N Cselyuszka, N Andrianov, A Roshanghias, ... 2022 IEEE Sensors, 1-4, 2022 | 3 | 2022 |
Soft mask-based dry etching of parylene AF4 for advanced packaging applications MLF Bellaredj, N Andrianov, R Kaufhold, G Miskovic 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC), 109-113, 2022 | 2 | 2022 |
Engineering mode coupling in a hybrid plasmon-photonic cavity for dual-band infrared spectroscopic gas sensing TD Dao, F Dubois, J Spettel, A Tortschanoff, C Fleury, N Cselyuszka, ... OSA Continuum 4 (6), 1827-1837, 2021 | 2 | 2021 |
Многосеточные энергоанализаторы задерживающего потенциала для измерения функции распределения ионов по энергиям из плазмы высокочастотного емкостного разряда A Nikolai Uspekhi Prikladnoi Fiziki 5 (6), 608-617, 2017 | 2 | 2017 |
Ultra-Fast Acoustofluidic Particle Focusing Using Lateral Modes of a Plate Transducer A Fuchsluger, A De Pastina, T Mitteramskogler, R Ecker, ... 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | 1 | 2023 |
Highly Selective Plasma Etching Technique for Molybdenum AA Osipov, NA Andrianov, AB Speshilova, AE Gagaeva, S Risquez, ... Plasma Chemistry and Plasma Processing 43 (3), 697-707, 2023 | 1 | 2023 |
Dual-frequency piezoelectric MEMS microphones based on AlSc30%N thin films for aeroacoustic measurements L Wu, Y Zhai, O Lokesh, C Bourquard, J Abbaszadeh, N Andrianov, ... AIAA AVIATION 2023 Forum, 4391, 2023 | 1 | 2023 |
Chemically enhanced dry etching of Al0. 7Sc0. 3N for MEMS applications N Andrianov, A De Pastina, S Risquez, M Moridi (Accepted/In press) 48th international conference on Micro and Nano …, 2022 | 1 | 2022 |
A Novel Approach to Characterize the Sodium Contamination Caused by Gas Filling During Anodic Bonding Y Zhang, F Solozzi, N Cselyuszka, K Sorchag, N Andrianov, M Bäuscher, ... 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS …, 2022 | 1 | 2022 |
Novel Piezoelectric MOEMS Platform A Lagosh, Y Zhai, S Risquez, A De Pastina, N Andrianov, L Vojkuvka, ... Micro and Nano Engineering (MNE) and EUROSENSORS 2022: MNE EUROSENSORS 2022, 2022 | 1 | 2022 |
Concept and Proof of Principle of an Acoustofluidic Single-Particle Sorting Device Using a Spatially Confined Acoustic Active Region A Fuchsluger, A De Pastina, T Mitteramskogler, R Ecker, ... Proceedings 97 (1), 41, 2024 | | 2024 |
Acoustofluidic Trapping in Structured Microchannels Using Lateral Transducer Modes A Fuchsluger, A De Pastina, T Mitteramskogler, R Ecker, ... 2023 IEEE SENSORS, 1-4, 2023 | | 2023 |
A novel method to characterize the correlation between gas diffusion and sodium contamination of anodic bonding Y Zhang, F Solazzi, M Schiffer, K Schreiber, N Cselyuszka, N Andrianov, ... MikroSystemTechnik Kongress 2023; Kongress, 291-294, 2023 | | 2023 |
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing A Roshanghias, J Kaczynski, A Rodrigues, M Hübner, M Zauner, ... ECS Transactions 112 (3), 221, 2023 | | 2023 |
Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications TD Dao, N Andrianov, M Chouiki, AS Munir, J Spettel, F Dubois, C Fleury, ... Optical Sensors, STu5C. 4, 2023 | | 2023 |