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Costas Spanos
Costas Spanos
Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley
Verified email at berkeley.edu
Title
Cited by
Cited by
Year
Fundamentals of semiconductor manufacturing and process control
GS May, CJ Spanos
John Wiley & Sons, 2006
4942006
Modeling within-die spatial correlation effects for process-design co-optimization
P Friedberg, Y Cao, J Cain, R Wang, J Rabaey, C Spanos
Sixth international symposium on quality electronic design (isqed'05), 516-521, 2005
2752005
Maintenance unit for a sensor apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,282,889, 2007
266*2007
Specular spectroscopic scatterometry
X Niu, N Jakatdar, J Bao, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 14 (2), 97-111, 2001
2072001
Distributed energy consumption control via real-time pricing feedback in smart grid
K Ma, G Hu, CJ Spanos
IEEE Transactions on Control Systems Technology 22 (5), 1907-1914, 2014
1732014
Model-based fault detection and identification for switching power converters
J Poon, P Jain, IC Konstantakopoulos, C Spanos, SK Panda, SR Sanders
IEEE Transactions on Power Electronics 32 (2), 1419-1430, 2016
1692016
Real-time statistical process control using tool data (semiconductor manufacturing)
CJ Spanos, HF Guo, A Miller, J Levine-Parrill
IEEE Transactions on Semiconductor Manufacturing 5 (4), 308-318, 1992
1491992
Microgrid to enable optimal distributed energy retail and end-user demand response
M Jin, W Feng, C Marnay, C Spanos
Applied Energy 210, 1321-1335, 2018
1432018
Measurement and analysis of variability in 45 nm strained-Si CMOS technology
LT Pang, K Qian, CJ Spanos, B Nikolic
IEEE Journal of Solid-State Circuits 44 (8), 2233-2243, 2009
1432009
MOD-DR: Microgrid optimal dispatch with demand response
M Jin, W Feng, P Liu, C Marnay, C Spanos
Applied energy 187, 758-776, 2017
1412017
Towards efficient data valuation based on the shapley value
R Jia, D Dao, B Wang, FA Hubis, N Hynes, NM Gürel, B Li, C Zhang, ...
The 22nd International Conference on Artificial Intelligence and Statistics …, 2019
1392019
Accurate indoor localization and tracking using mobile phone inertial sensors, WiFi and iBeacon
H Zou, Z Chen, H Jiang, L Xie, C Spanos
2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017
1362017
Statistical experimental design in plasma etch modeling
GS May, J Huang, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 4 (2), 83-98, 1991
1361991
WinIPS: WiFi-based non-intrusive indoor positioning system with online radio map construction and adaptation
H Zou, M Jin, H Jiang, L Xie, CJ Spanos
IEEE Transactions on Wireless Communications 16 (12), 8118-8130, 2017
1292017
Specular spectroscopic scatterometry in DUV lithography
X Niu, NH Jakatdar, J Bao, CJ Spanos, SK Yedur
Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999
1241999
WinLight: A WiFi-based occupancy-driven lighting control system for smart building
H Zou, Y Zhou, H Jiang, SC Chien, L Xie, CJ Spanos
Energy and Buildings 158, 924-938, 2018
1222018
Semiconductor yield improvement: results and best practices
SP Cunningham, CJ Spanos, K Voros
IEEE Transactions on Semiconductor Manufacturing 8 (2), 103-109, 1995
1221995
A data-driven strategy for detection and diagnosis of building chiller faults using linear discriminant analysis
D Li, G Hu, CJ Spanos
Energy and Buildings 128, 519-529, 2016
1112016
A digital twin approach for fault diagnosis in distributed photovoltaic systems
P Jain, J Poon, JP Singh, C Spanos, SR Sanders, SK Panda
IEEE Transactions on Power Electronics 35 (1), 940-956, 2019
1102019
Statistical equipment modeling for VLSI manufacturing: An application for LPCVD
KK Lin, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 3 (4), 216-229, 1990
1051990
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