Fast and reliable measurement of thin film thickness profile based on wavelet transform in spectrally resolved white-light interferometry MG Kim, HJ Pahk International Journal of Precision Engineering and Manufacturing 19, 213-219, 2018 | 19 | 2018 |
Improved measurement of thin film thickness in spectroscopic reflectometer using convolutional neural networks MG Kim International Journal of Precision Engineering and Manufacturing 21 (2), 219-225, 2020 | 16 | 2020 |
Improvement of spectral resolution in spectroscopic imaging reflectometer using rotating-type filter and tunable aperture MG Kim Measurement Science and Technology 29 (10), 105001, 2018 | 7 | 2018 |
Spectroscopic imaging ellipsometry for two-dimensional thin film thickness measurement using a digital light processing projector MG Kim Measurement Science and Technology 33 (9), 095016, 2022 | 6 | 2022 |
Simulation of thin film thickness distribution for thermal evaporation process using a scanning linear source MG Kim, HJ Pahk Journal of the society for information display 25 (4), 249-257, 2017 | 6 | 2017 |
Accurate determination of two-dimensional thin film thickness in spectroscopic imaging reflectometer using color camera and tunable aperture M Kim, G Choi Optics Communications 435, 75-80, 2019 | 3 | 2019 |
Measurement of two-dimensional thickness of micro-patterned thin film based on image restoration in a spectroscopic imaging reflectometer M Kim, J Kim Applied Optics 57 (13), 3423-3428, 2018 | 3 | 2018 |