| Methods for selective and conformal epitaxy of highly doped Si-containing materials for three dimensional structures M Shinriki, P Brabant, K Chung US Patent App. 14/063,118, 2014 | 368 | 2014 |
| Thin films and methods of making them using cyclohexasilane R Torres Jr, TA Francis, S Hasaka, PD Brabant US Patent App. 13/135,033, 2012 | 348 | 2012 |
| Low temperature epitaxy of a semiconductor alloy including silicon and germanium employing a high order silane precursor PD Brabant, K Chung, H He, DK Sadana, M Shinriki US Patent 9,218,962, 2015 | 288 | 2015 |
| Substrate support system for reduced autodoping and backside deposition MG Goodman, J Stoutyesdijk, R Aggarwal, M Halpin, T Keeton, ... US Patent 7,648,579, 2010 | 288 | 2010 |
| Selective deposition of silicon-containing films M Bauer, C Arena, R Bertram, P Tomasini, N Cody, P Brabant, J Italiano, ... US Patent 7,816,236, 2010 | 128 | 2010 |
| Low temperature load and bake PD Brabant, JP Italiano, J Wen US Patent 7,108,748, 2006 | 95 | 2006 |
| Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 7,238,595, 2007 | 57 | 2007 |
| Low temperature load and bake PD Brabant, JP Italiano, J Wen US Patent 7,462,239, 2008 | 56 | 2008 |
| Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 7,115,521, 2006 | 54 | 2006 |
| Enhanced selectivity for epitaxial deposition CJ Arena, JP Italiano, PD Brabant US Patent 6,998,305, 2006 | 54 | 2006 |
| Germanium deposition M Bauer, P Brabant, T Landin US Patent 7,329,593, 2008 | 41 | 2008 |
| Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy MA Todd, PD Brabant, KD Weeks, J Wen US Patent 7,029,995, 2006 | 30 | 2006 |
| Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers M Shinriki, K Chung, S Hasaka, P Brabant, H He, TN Adam, D Sadana Thin Solid Films 520 (8), 3190-3194, 2012 | 25 | 2012 |
| Low temperature selective epitaxy of silicon germanium alloys employing cyclic deposit and etch PD Brabant, K Chung, H He, DK Sadana, M Shinriki US Patent 8,642,454, 2014 | 23 | 2014 |
| Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 7,682,947, 2010 | 23 | 2010 |
| Germanium deposition M Bauer, P Brabant, T Landin US Patent 7,479,443, 2009 | 18 | 2009 |
| Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 7,402,504, 2008 | 18 | 2008 |
| Heteroepitaxial deposition over an oxidized surface KD Weeks, PD Brabant US Patent 7,901,968, 2011 | 16 | 2011 |
| Methods and apparatus for selective epitaxy of Si-containing materials and substitutionally doped crystalline Si-containing material TA Francis, S Hasaka, PD Brabant, R Torres Jr, H He, A Reznicek, ... US Patent 8,759,200, 2014 | 15 | 2014 |
| Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 8,530,340, 2013 | 15 | 2013 |
