| Broadband transparent optical phase change materials for high-performance nonvolatile photonics Y Zhang, JB Chou, J Li, H Li, Q Du, A Yadav, S Zhou, MY Shalaginov, ... Nature communications 10 (1), 4279, 2019 | 899 | 2019 |
| Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material Y Zhang, C Fowler, J Liang, B Azhar, MY Shalaginov, S Deckoff-Jones, ... Nature Nanotechnology 16 (6), 661-666, 2021 | 375 | 2021 |
| Reconfigurable all-dielectric metalens with diffraction-limited performance MY Shalaginov, S An, Y Zhang, F Yang, P Su, V Liberman, JB Chou, ... Nature communications 12 (1), 1225, 2021 | 278 | 2021 |
| Superresolution microscopy by movable thinfilms with embedded microspheres: resolution analysis KW Allen, N Farahi, Y Li, NI Limberopoulos, DE Walker Jr, AM Urbas, ... Annalen der Physik 527 (7-8), 513-522, 2015 | 167 | 2015 |
| Ultraviolet spectroscopy and UV lasers P Misra, MA Dubinskii CRC Press, 2002 | 144 | 2002 |
| Method of forming active devices of different gatelengths using lithographic printed gate images of same length JW Golz, B Khan, JC Liu, CJ Waskiewicz, TJ Wu US Patent 6,703,312, 2004 | 117 | 2004 |
| Molecular beam epitaxy of high quality Hg1− xCdxTe films with control of the composition distribution VS Varavin, SA Dvoretsky, VI Liberman, NN Mikhailov, YG Sidorov Journal of crystal growth 159 (1-4), 1161-1166, 1996 | 114 | 1996 |
| Review of technology for 157-nm lithography AK Bates, M Rothschild, TM Bloomstein, TH Fedynyshyn, RR Kunz, ... IBM Journal of Research and development 45 (5), 605-614, 2001 | 112 | 2001 |
| A nanoparticle convective directed assembly process for the fabrication of periodic surface enhanced Raman spectroscopy substrates V Liberman, C Yilmaz, TM Bloomstein, S Somu, Y Echegoyen, ... Adv. Mater 22 (38), 4298-4302, 2010 | 106 | 2010 |
| Multilevel electrothermal switching of optical phasechange materials using graphene C Ríos, Y Zhang, MY Shalaginov, S Deckoff-Jones, H Wang, S An, ... Advanced Photonics Research 2 (1), 2000034, 2021 | 92 | 2021 |
| Experimentation and modeling of organic photocontamination on lithographic optics RR Kunz, V Liberman, DK Downs Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 90 | 2000 |
| Materials issues for optical components and photomasks in 157 nm lithography V Liberman, TM Bloomstein, M Rothschild, JHC Sedlacek, RS Uttaro, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999 | 89 | 1999 |
| 157 nm: Deepest deep-ultraviolet yet M Rothschild, TM Bloomstein, JE Curtin, DK Downs, TH Fedynyshyn, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999 | 87 | 1999 |
| Periodically poled BaMgF4 for ultraviolet frequency generation SC Buchter, TY Fan, V Liberman, JJ Zayhowski, M Rothschild, EJ Mason, ... Optics Letters 26 (21), 1693-1695, 2001 | 82 | 2001 |
| Liquid immersion lithography: Why, how, and when? M Rothschild, TM Bloomstein, RR Kunz, V Liberman, M Switkes, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004 | 73 | 2004 |
| Mid-infrared photothermal heterodyne spectroscopy in a liquid crystal using a quantum cascade laser A Mërtiri, T Jeys, V Liberman, MK Hong, J Mertz, H Altug, S Erramilli Applied Physics Letters 101 (4), 2012 | 72 | 2012 |
| Permittivity evaluation of multilayered hyperbolic metamaterials: Ellipsometry vs. reflectometry T Tumkur, Y Barnakov, ST Kee, MA Noginov, V Liberman Journal of Applied Physics 117 (10), 2015 | 69 | 2015 |
| Broadband transparent optical phase change materials Y Zhang, J Li, J Chou, Z Fang, A Yadav, H Lin, Q Du, J Michon, Z Han, ... CLEO: Science and Innovations, JTh5C. 4, 2017 | 66 | 2017 |
| The growth of highquality MCT films by MBE using insitu ellipsometry KK Svitashev, SA Dvoretsky, YG Sidorov, VA Shvets, AS Mardezhov, ... Crystal Research and Technology 29 (7), 931-937, 1994 | 64 | 1994 |
| Recent trends in optical lithography M Rothschild, TM Bloomstein, TH Fedynyshyn, RR Kunz, V Liberman, ... Lincoln Laboratory Journal 14 (2), 221-236, 2003 | 63 | 2003 |
