| Fused-Silica Micro Birdbath Resonator Gyroscope (-BRG) JY Cho, JK Woo, J Yan, RL Peterson, K Najafi Journal of Microelectromechanical Systems 23 (1), 66-77, 2013 | 135 | 2013 |
| 3-dimensional blow torch-molding of fused silica microstructures JY Cho, J Yan, JA Gregory, HW Eberhart, RL Peterson, K Najafi Journal of Microelectromechanical Systems 22 (6), 1276-1284, 2013 | 76 | 2013 |
| High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding J Cho, J Yan, JA Gregory, H Eberhart, RL Peterson, K Najafi 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 61 | 2013 |
| A high-Q birdbath resonator gyroscope (BRG) J Cho, JK Woo, J Yan, RL Peterson, K Najafi 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 46 | 2013 |
| DRIE of fused silica Z Cao, B VanDerElzen, KJ Owen, J Yan, G He, RL Peterson, D Grimard, ... 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 22 | 2013 |
| Solid-state sensors, actuators and microsystems (TRANSDUCERS & EUROSENSORS XXVII)," 2013 transducers & eurosensors XXVII The 17th Int. Conf. on J Cho, JK Woo, J Yan, RL Peterson, K Najafi IEEE, 2013 | 5 | 2013 |
