A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm C Weichert, P Köchert, R Köning, J Flügge, B Andreas, U Kuetgens, ... Measurement Science and Technology 23 (9), 094005, 2012 | 110 | 2012 |
Comparison of the performance of the next generation of optical interferometers M Pisani, A Yacoot, P Balling, N Bancone, C Birlikseven, M Celik, ... Metrologia 49 (4), 455, 2012 | 104 | 2012 |
Phase measurement of various commercial heterodyne He–Ne-laser interferometers with stability in the picometer regime P Köchert, J Flügge, C Weichert, R Köning, E Manske Measurement Science and Technology 23 (7), 074005, 2012 | 73 | 2012 |
A high performance one-dimensional homodyne encoder and the proof of principle of a novel two-dimensional homodyne encoder J Guan, P Köchert, C Weichert, R Tutsch Precision Engineering 37 (4), 865-870, 2013 | 38 | 2013 |
Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision E Manske, T Fröhlich, R Füßl, I Ortlepp, R Mastylo, U Blumröder, ... Measurement Science and Technology 31 (8), 085005, 2020 | 31 | 2020 |
Air index compensated interferometer as a prospective novel primary standard for baseline calibrations K Meiners-Hagen, A Bošnjakovic, P Köchert, F Pollinger Measurement Science and Technology 26 (8), 084002, 2015 | 22 | 2015 |
Simultaneous multiple degrees of freedom (DoF) measurement system G Molnar, S Strube, P Köchert, HU Danzebrink, J Flügge Measurement Science and Technology 27 (8), 084011, 2016 | 17 | 2016 |
A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability J Guan, P Köchert, C Weichert, R Köning, L Siaudinyte, J Flügge Precision Engineering 50, 114-118, 2017 | 16 | 2017 |
Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage J Flügge, R Köning, E Schötka, C Weichert, P Köchert, H Bosse, ... Optical Engineering 122404 (53), 5, 2014 | 16 | 2014 |
Implementation of straightness measurements at the nanometer comparator C Weichert, H Bosse, J Flügge, R Köning, P Köchert, A Wiegmann, ... CIRP Annals 65 (1), 507-510, 2016 | 13 | 2016 |
The European GeoMetre project: developing enhanced large-scale dimensional metrology for geodesy F Pollinger, S Baselga, C Courde, C Eschelbach, L García-Asenjo, ... Applied Geomatics 15 (2), 371-381, 2023 | 12 | 2023 |
Combining harmonic laser beams by fiber components for refractivity–compensating two-color interferometry Y Liu, A Röse, G Prellinger, P Köchert, J Zhu, F Pollinger Journal of Lightwave Technology 38 (7), 1945-1952, 2020 | 12 | 2020 |
Ultrastable metrology laser at 633 nm using an optical frequency comb P Köchert, U Blumröder, E Manske Optical Micro-and Nanometrology VII 10678, 160-171, 2018 | 12 | 2018 |
Stability of a fiber-fed heterodyne interferometer C Weichert, J Flügge, P Köchert, R Köning, R Tutsch Laser Metrology for Precision Measurement and Inspection in Industry 1000, 9, 2011 | 12 | 2011 |
Scale spanning subnanometer metrology up to ten decades E Manske, T Fröhlich, R Füßl, R Mastylo, U Blumröder, P Köchert, O Birli, ... Optical measurement systems for industrial inspection XI 11056, 130-136, 2019 | 10 | 2019 |
Redetermination of the Abbe Errors’ Uncertainty Contributions at the Nanometer Comparator R Köning, C Weichert, P Köchert, J Guan, J Flügge MEASUREMENT, 2013 | 10 | 2013 |
Investigation into the limitations of straightness interferometers using a multisensor-based error separation method C Weichert, P Köchert, E Schötka, J Flügge, E Manske Measurement Science and Technology 29 (6), 064001, 2018 | 8 | 2018 |
Nonlinearity of a double-path interferometer qualified with a non-constant moving speed H Yang, C Weichert, P Köchert, J Flügge Optics Letters 41 (23), 5478-5481, 2016 | 8 | 2016 |
Comb-referenced metrology laser for interferometric length measurements in nanopositioning and nanomeasuring machines U Blumröder, P Köchert, J Flügge, R Füßl, I Ortlepp, E Manske tm-Technisches Messen 89 (10), 687-703, 2022 | 7 | 2022 |
Ultra-präzise Lageregelung mittels interferometrischer Positionsdetektion und Tauchspulenantrieb P Köchert, J Flügge, R Köning, C Weichert, E Manske tm-Technisches Messen 81 (6), 316-323, 2014 | 7 | 2014 |